Skip to main content
SpringerLink
Log in

Surface Studies by SEM and STEM

  • Conference paper
Evaluation of Advanced Semiconductor Materials by Electron Microscopy

Part of the book series: NATO ASI Series ((NSSB,volume 203))

  • 166 Accesses

Abstract

Scanning electron (SEM) and scanning transmission (STEM) electron microscopy are versatile, well established, techniques for characterisation of materials. Other papers in this volume attest to their widespread use for understanding semiconductors, and devices based on these various material combinations. This paper concentrates on studies performed in ultra-high vacuum (UHV), so that clean surfaces can be produced and maintained during the experiments. Under such conditions, several SEM and STEM signals have sensitivity at the monolayer (ML) level, so that true surface studies can be carried out.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. J.A. Venables, Ultramicroscopy 7, 81 (1981); in: Chemistry and Physics of Solid Surfaces IV, Eds. R. Vanselow and R. Howe (Springer, Berlin, 1982) Ch. 6.

    Article  CAS  Google Scholar 

  2. J.A. Venables, D.R. Batchelor, M. Hanbücken, C.J. Harland, G.W. Jones, Phil. Trans. Roy. Soc. A318, 243 (1986).

    Google Scholar 

  3. J.A. Venables, D.J. Smith and J.M. Cowley, Surface Sci. 181, 235 (1987), and refs. quoted.

    Article  CAS  Google Scholar 

  4. For recent STM conferences proceedings, see Surface Sci. 181 (1987); J. Vac. Sci. Tech. (1988, in press); J. Microscopy (1988, in press).

    Google Scholar 

  5. W. Telieps and E. Bauer, Ultramicroscopy 17, 57 (1987); Scanning Microscopy Suppl. 1, 99 (1987)

    Article  Google Scholar 

  6. W. Telieps, Appl. Phys. A44, 55 (1987); E. Bauer, this volume, and refs. quoted.

    CAS  Google Scholar 

  7. K. Yagi, J. Appl. Cryst. 20, 147 (1987).

    Article  CAS  Google Scholar 

  8. J. A. Venables and G. Cox, Ultramicroscopy 21, 33 (1987) and refs. quoted;

    Article  Google Scholar 

  9. C. Mory, C. Colliex and J.M. Cowley, Ultramicroscopy 21, 171 (1987).

    Article  Google Scholar 

  10. The techniques CBED, EELS and EDX are extensively covered in other papers in this volume.

    Google Scholar 

  11. P.A. Bennett, B.N. Halawith and A.P. Johnson, J. Vac. Sci. Tech. A5, 2121 (1987); Phys. Rev. B37, 4268 (1988).

    Google Scholar 

  12. M. Ichikawa, T. Doi, M. Ichihashi and K. Hayakawa, Jap. J. Appl. Phys. 23, 913 (1984); Appl. Phys. Lett. 50, 1141 (1987).

    Article  CAS  Google Scholar 

  13. T. Ichinokawa and Y. Ishikawa, Ultramicroscopy 15, 193 (1984);

    Article  CAS  Google Scholar 

  14. T. Ichinokawa, Y. Ishikawa, M. Kemmochi, N. Ikeda, Y. Hosokawa and J. Kirschner, Scanning Microscopy Suppl. 1, 93 (1987).

    Google Scholar 

  15. M. Prutton, R. Browning, M.M. El Gomati and D.C. Peacock, Vacuum 32, 351 (1982).

    Article  CAS  Google Scholar 

  16. M. Prutton and M.M. El Gomati, Inst. Phys. Conf. Ser. 93, 255 (1988).

    CAS  Google Scholar 

  17. G.D.T. Spiller, P. Akhter and J.A. Venables, Surface Sci. 131, 517 (1983).

    Article  CAS  Google Scholar 

  18. M. Hanbücken, M. Futamoto and J.A. Venables, Surface Sci. 147, 433 (1984).

    Article  Google Scholar 

  19. M. Futamoto, M. Hanbücken, C.J. Harland, G.W. Jones and J.A. Venables, Surface Sci. 150, 430 (1985).

    Article  CAS  Google Scholar 

  20. C.J. Harland and J.A. Venables, Ultramicroscoy 17, 9 (1985).

    Article  CAS  Google Scholar 

  21. J.A. Venables, Proc. Int. Cong, on Electron Microscopy, Kyoto 1, 75 (1986).

    Google Scholar 

  22. C.J. Harland, G.W. Jones, T. Doust and J.A. Venables, Scanning Microscopy Suppl. 1, 109 (1987).

    Google Scholar 

  23. G.W. Jones and J.A. Venables, Ultramicroscopy 18, 439 (1985).

    Article  CAS  Google Scholar 

  24. J.A. Venables, T. Doust and R. Kariotis, Materials Research Symp. 94, 3 (1987); to be published.

    Article  CAS  Google Scholar 

  25. E.J. van Loenen, J.F. van der Veen and F.K. LeGoues, Surface Sci. 157, 1 (1985).

    Article  Google Scholar 

  26. J.M. Gibson, J.L. Batstone, R.T. Tung and F.C. Unterwald, Phys. Rev. Lett. 60, 1158 (1988).

    Article  PubMed  CAS  Google Scholar 

  27. See e.g., P.J. Dobson, these proceedings, and refs. quoted.

    Google Scholar 

  28. J.A.D. Matthew, M. Prutton, M.M. El Gomati and D.C. Peacock, Surf. Interface Analysis 11, 173 (1988).

    Article  CAS  Google Scholar 

  29. D.R. Batchelor, P. Rez, D.J. Fathers and J.A. Venables, Surf. Interface Analysis in press; D.R. Batchelor, H.E. Bishop and J.A. Venables, ibid, submitted.

    Google Scholar 

  30. P.A. Bennett, X. Tong and J.R. Butler, J. Vac. Sci. Tech. B6, 13S6 (1988).

    Google Scholar 

  31. P.A. Bennett, J.R. Butler and X. Tong, J. Vac. Sci. Tech. in press.

    Google Scholar 

  32. M.M. El Gomati and J.A.D. Matthew, J. Microscopy 147, 137 (1987); Appl. Surface Sci. 32, 320 (1988).

    Article  Google Scholar 

  33. J.A. Venables, J.M. Cowley and H.S. von Harrach, Institute of Physics Conf. Ser. 90, 85 (1987).

    CAS  Google Scholar 

  34. The tests were performed by S. von Harrach, R.J. Keyse, G.G. Hembree and J.M. Cowley.

    Google Scholar 

  35. P. Kruit and J.A. Venables, Ultramicroscopy 25, 183 (1988).

    Article  Google Scholar 

  36. G.G. Hembree, Luo Chuan-Hong, P.A. Bennett and J.A. Venables, Proc. 46th EMSA meeting (1988) 666.

    Google Scholar 

  37. J. Liu and J.M. Cowley, Scanning Microscopy 2, 65 (1988); Ultramicroscopy 23, 463 (1987).

    CAS  Google Scholar 

  38. D. Imeson, R.H. Milne, S.D. Berger and D. McMullan, Ultramicroscopy 17, 243 (1985).

    Article  CAS  Google Scholar 

  39. R.L. Gerlach and N.C. McDonald, Scanning Electron Microscopy 1, 199 (1976);.

    Google Scholar 

  40. R.L. Gerlach and N.C. McDonald, Scanning Electron Microscopy 1, 213 (1979).

    Google Scholar 

  41. G. Todd, H. Poppa and L.H. Veneklasen 1, 207 (1979);

    Google Scholar 

  42. G. Todd, H. Poppa and L.H. Veneklasen, Thin Solid Films 57, 213 (1979).

    Google Scholar 

  43. C.J. Harland, G. Cox, D.J. Fathers, P.S. Flora, M. Hardiman, G. Raynerd, M. Whitehouse-Yeo and J.A. Venables, Inst. Phys. Conf. Ser. 90, 9 (1987).

    Google Scholar 

  44. J.A. Venables, D.R. Batchelor, P.S. Flora, C.J. Harland, G.G. Hembree and Luo Chuan-Hong, J. Micr. et Spectr. Electronique, in press.

    Google Scholar 

  45. P. Kruit and J.A. Venables, Scanning Microscopy Suppl. 1, 115 (1987).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. School of Mathematical & Physical Sciences, University of Sussex, Brighton, BN1 9QH, UK

    J. A. Venables

  2. Department of Physics, Arizona State University, Tempe, AZ, 85287, USA

    J. A. Venables & P. A. Bennett

Authors
  1. J. A. Venables
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. P. A. Bennett
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. University of Bristol, Bristol, UK

    David Cherns

Rights and permissions

Reprints and permissions

Copyright information

© 1989 Plenum Press, New York

About this paper

Cite this paper

Venables, J.A., Bennett, P.A. (1989). Surface Studies by SEM and STEM. In: Cherns, D. (eds) Evaluation of Advanced Semiconductor Materials by Electron Microscopy. NATO ASI Series, vol 203. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0527-9_22

Download citation

  • DOI: https://doi.org/10.1007/978-1-4613-0527-9_22

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4612-7850-4

  • Online ISBN: 978-1-4613-0527-9

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation