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X-Ray Spectral Measurement: WDS and EDS

  • Joseph I. Goldstein
  • Dale E. Newbury
  • Patrick Echlin
  • David C. Joy
  • A. D. RomigJr.
  • Charles E. Lyman
  • Charles Fiori
  • Eric Lifshin

Abstract

Chemical analysis in the scanning electron microscope and electron microprobe is performed by measuring the energy and intensity distribution of the x-ray signal generated by a focused electron beam. The subject of x-ray production has already been introduced in Chapter 3, on electron-beam—specimen interactions, which describes the mechanisms for both characteristic and continuum x-ray production. This chapter is concerned with the methods for detecting and measuring these x rays as well as converting them into a useful form for qualitative and quantitative analysis.

Keywords

Clock Pulse Escape Peak Main Amplifier Ground Loop Pulse Distribution 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Copyright information

© Plenum Press, New York 1992

Authors and Affiliations

  • Joseph I. Goldstein
    • 1
  • Dale E. Newbury
    • 2
  • Patrick Echlin
    • 3
  • David C. Joy
    • 4
  • A. D. RomigJr.
    • 5
  • Charles E. Lyman
    • 1
  • Charles Fiori
    • 2
  • Eric Lifshin
    • 6
  1. 1.Lehigh UniversityBethlehemUSA
  2. 2.National Institute of Standards and TechnologyGaithersburgUSA
  3. 3.University of CambridgeCambridgeEngland
  4. 4.University of TennesseeKnoxvilleUSA
  5. 5.Sandia National LaboratoriesAlbuquerqueUSA
  6. 6.General Electric Corporate Research and DevelopmentSchenectadyUSA

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