X-Ray Spectral Measurement: WDS and EDS

  • Joseph I. Goldstein
  • Dale E. Newbury
  • Patrick Echlin
  • David C. Joy
  • A. D. RomigJr.
  • Charles E. Lyman
  • Charles Fiori
  • Eric Lifshin

Abstract

Chemical analysis in the scanning electron microscope and electron microprobe is performed by measuring the energy and intensity distribution of the x-ray signal generated by a focused electron beam. The subject of x-ray production has already been introduced in Chapter 3, on electron-beam—specimen interactions, which describes the mechanisms for both characteristic and continuum x-ray production. This chapter is concerned with the methods for detecting and measuring these x rays as well as converting them into a useful form for qualitative and quantitative analysis.

Keywords

Cellulose Titanium Nickel Phosphorus Chromium 

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Copyright information

© Plenum Press, New York 1992

Authors and Affiliations

  • Joseph I. Goldstein
    • 1
  • Dale E. Newbury
    • 2
  • Patrick Echlin
    • 3
  • David C. Joy
    • 4
  • A. D. RomigJr.
    • 5
  • Charles E. Lyman
    • 1
  • Charles Fiori
    • 2
  • Eric Lifshin
    • 6
  1. 1.Lehigh UniversityBethlehemUSA
  2. 2.National Institute of Standards and TechnologyGaithersburgUSA
  3. 3.University of CambridgeCambridgeEngland
  4. 4.University of TennesseeKnoxvilleUSA
  5. 5.Sandia National LaboratoriesAlbuquerqueUSA
  6. 6.General Electric Corporate Research and DevelopmentSchenectadyUSA

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