X-Ray Spectral Measurement: WDS and EDS
Chemical analysis in the scanning electron microscope and electron microprobe is performed by measuring the energy and intensity distribution of the x-ray signal generated by a focused electron beam. The subject of x-ray production has already been introduced in Chapter 3, on electron-beam—specimen interactions, which describes the mechanisms for both characteristic and continuum x-ray production. This chapter is concerned with the methods for detecting and measuring these x rays as well as converting them into a useful form for qualitative and quantitative analysis.
KeywordsCellulose Titanium Nickel Phosphorus Chromium
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