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Time of Flight ERDA

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Book cover Forward Recoil Spectrometry

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Abstract

Determining mass separation between scattered and recoiled particles by measuring the TOF parameter of neutral or ionic species was first used at low energies; for example at the end of the seventies, Chen and coworkers studied gold targets using 8-keV Ar+.(1) The MeV ERDA techniques were used for many years, but these were principally applied in materials research to determine depth profiles of a specific target matrix element, such as hydrogen or one of its isotopes. With the increasing development of multilayer thin-film microelectronic devices, metalized polymers and advanced ceramic materials, there is a need to depth profile a range of other light elements simultaneously, such as B, C, N, O, Al, Si, P, and some three-dimensional transition metals.

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Authors
  1. Nick Dytlewski
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© 1996 Plenum Press, New York

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Dytlewski, N. (1996). Time of Flight ERDA. In: Forward Recoil Spectrometry. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0353-4_6

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  • DOI: https://doi.org/10.1007/978-1-4613-0353-4_6

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-8012-2

  • Online ISBN: 978-1-4613-0353-4

  • eBook Packages: Springer Book Archive

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