Although ERDA is a relatively novel technique for profiling light elements, it is also the oldest if dated from its first description. It is now one of the most promising ion beam techniques, and it is widely used in the energy range from 50 keV–300 MeV. Since the special session of the IBA-12 Conference, a general agreement in favor of the acronym ERDA has replaced a multitude of names and acronyms.
KeywordsEnergy Spreading Depth Resolution Nuclear Reaction Analysis Recoil Angle Energy Straggling
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