Skip to main content
SpringerLink
Log in

Integration of Microcomponents

  • Chapter
  • First Online:
Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications

Part of the book series: SpringerBriefs in Applied Sciences and Technology ((BRIEFSAPPLSCIENCES))

  • 1784 Accesses

Abstract

Various microcomponents, including microelectrodes and micro-optic and microfluidic components, can be fabricated in transparent materials by femtosecond laser direct writing. This chapter describes in detail techniques for integrating different types of microcomponents on a single substrate for constructing highly functional microfluidic, photonic, and optofluidic systems and devices. Several examples are described, including integration of microlenses and waveguides for beam collimation and focusing, integration of a micro-optical ring cavity and a microfluidic chamber for creating 3D microfluidic dye lasers, integration of microelectrodes and waveguide-based Mach–Zehnder interferometer in a lithium niobate (LiNbO3) crystal for constructing an optical modulator, and integration of micro-optic and microfluidic components in glass for optofluidic applications.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. Sugioka K, Cheng Y (2012) Femtosecond laser processing for optofluidic fabrication. Lab Chip 12:3576–3589

    Article  Google Scholar 

  2. Osellame R, Hoekstra HJWM, Cerullo1 G et al (2011) Femtosecond laser microstructuring: an enabling tool for optofluidic lab-on-chips. Laser Photonics Rev 5:442–463

    Google Scholar 

  3. Schaap A, Rohrlack T, Bellouard Y (2012) Optical classification of algae species with a glass lab-on-a-chip. Lab Chip 12:1527–1532

    Article  Google Scholar 

  4. Xu J, Liao Y, Zeng HD et al (2007) Selective metallization on insulator surfaces with femtosecond laser pulses. Opt Express 15:12743–12748

    Article  Google Scholar 

  5. Hanada Y, Sugioka K, Midorikawa K (2008) Selective metallization of photostructurable glass by femtosecond laser direct writing for biochip application. Appl Phys A 90:603–607

    Article  Google Scholar 

  6. Camou S, Fujita H, Fujii T (2003) PDMS 2D optical lens integrated with microfluidic channels: principle and characterization. Lab Chip 3:40–45

    Article  Google Scholar 

  7. Wang Z, El-Ali J, Engelund M (2004) Measurements of scattered light on a microchip flow cytometer with integrated polymer based optical elements. Lab Chip 4:372–377

    Article  Google Scholar 

  8. Wang Z, Sugioka K, Hanada Y et al (2007) Optical waveguide fabrication and integration with a micro-mirror inside photosensitive glass by femtosecond laser direct writing. Appl Phys A 88:699–704

    Article  Google Scholar 

  9. Wang Z, Sugioka K, Hanada Y et al (2007) Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing. Appl Phys A 89:951–955

    Article  Google Scholar 

  10. Cheng Y, Sugioka K, Midorikawa K (2006) Freestanding optical fibers fabricated in a glass chip by femtosecond laser micromachining for lab-on-a-chip application: erratum. Opt Express 14:11910

    Article  Google Scholar 

  11. Li LX, Nordin G, English J et al (2003) Small-area bends and beamsplitters for lowindex-contrast waveguides. Opt Express 11:282–290

    Article  Google Scholar 

  12. Cheng Y, Sugioka K, Midorikawa K et al (2004) Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing. Opt Lett 29:2007–2009

    Article  Google Scholar 

  13. Helbo B, Kristensen A, Menon A (2003) A micro-cavity fluidic dye laser. J Micromech Microeng 13:307–311

    Article  Google Scholar 

  14. Li ZY, Zhang ZY, Emery T et al (2006) Single mode optofluidic distributed feedback dye laser. Opt Express 14:696–701

    Article  Google Scholar 

  15. Cheng Y, Sugioka K, Midorikawa K (2005) Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications. Appl Surf Sci 248:172–176

    Article  Google Scholar 

  16. Moon HJ, Chough YT, An K (2000) Cylindrical microcavity laser based on the evanescent-wave-coupled gain. Phys Rev Lett 85:3161–3164

    Article  Google Scholar 

  17. Ramer OG (1982) Integrated optic electrooptic modulator electrode analysis. IEEE J Quant Electron 18:386–392

    Article  Google Scholar 

  18. Wooten EL, Kissa KM, Yi-Yan A et al (2000) A review of lithium niobate modulators for fiber-optic communications systems. IEEE J Sel Top Quant 6:69–82

    Article  Google Scholar 

  19. Lu YQ, Wan ZL, Wang Q et al (2000) Electro-optic effect of periodically poled optical superlattice LiNbO3 and its applications. Appl Phys Lett 77:3719–3721

    Article  Google Scholar 

  20. Liao Y, Xu J, Cheng Y et al (2008) Electro-optic integration of embedded electrodes and waveguides in LiNbO3 using a femtosecond laser. Opt Lett 33:2281–2283

    Article  Google Scholar 

  21. Burghoff J, Grebing C, Nolte S et al (2006) Efficient frequency doubling in femtosecond laser-written waveguides in lithium niobate. Appl Phys Lett 89(3):081108

    Google Scholar 

  22. Thomas J, Heinrich M, Burghoff J et al (2007) Femtosecond laser-written quasi-phase-matched waveguides in lithium niobate. Appl Phys Lett 91(3):151108

    Google Scholar 

  23. Binh LN (2006) Lithium niobate optical modulators Devices and applications. J Cryst Growth 288:180–187

    Article  Google Scholar 

  24. Crespi A, Gu Y, Ngamsom B et al (2010) Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection. Lab Chip 10:1167–1173

    Article  Google Scholar 

  25. Applegate RW, Squier J, Vested T et al (2006) Microfluidic sorting system based on optical waveguide integration and diode laser bar trapping. Lab Chip 6:422–426

    Article  Google Scholar 

  26. Bellouard Y, Said AA, Dugan M et al (2003) Monolithic three-dimensional integration of micro-fluidic channels and optical waveguides in fused silica. Proc Mater Res Soc Fall Meet Symp A (Mater Res Soc) 782:63–68

    Google Scholar 

  27. Maselli V, Grenier JR, Ho S et al (2009) Femtosecond laser written optofluidic sensor: Bragg grating waveguide evanescent probing of microfluidic channel. Opt Express 17:11719–11729

    Article  Google Scholar 

  28. Vazquez RM, Osellame R, Nolli D et al (2009) Integration of femtosecond laser written optical waveguides in a lab-on-chip. Lab Chip 9:91–96

    Article  Google Scholar 

  29. Kim M, Hwang DJ, Jeon H et al (2009) Single cell detection using a glass-based optofluidic device fabricated by femtosecond laser pulses. Lab Chip 9:311–318

    Article  Google Scholar 

  30. Schaap A, Bellouard Y, Rohrlack T et al (2011) Optofluidic lab-on-a-chip for rapid algae population screening. Biomed Opt Express 2:658–664

    Article  Google Scholar 

  31. Bragheri F, Ferrara L, Bellini N et al (2010) Optofluidic chip for single cell trapping and stretching fabricated by a femtosecond laser. J Biophotonics 3:234–243

    Article  Google Scholar 

  32. Bellini N, Vishnubhatla KC, Bragheri F et al (2010) Femtosecond laser fabricated monolithic chip for optical trapping and stretching of single cells. Opt Express 18:4679–4688

    Article  Google Scholar 

  33. Heideman RG, Lambeck PV (1999) Remote opto-chemical sensing with extreme sensitivity: design, fabrication and performance of a pigtailed integrated optical phase-modulated Mach-Zehnder interferometer system. Sens Actuat B 61:100–127

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Laser Technology Laboratory, RIKEN, Saitama, Japan

    Koji Sugioka

  2. State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, People’s Republic of China

    Ya Cheng

Authors
  1. Koji Sugioka
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Ya Cheng
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Koji Sugioka .

Rights and permissions

Reprints and permissions

Copyright information

© 2014 The Author(s)

About this chapter

Cite this chapter

Sugioka, K., Cheng, Y. (2014). Integration of Microcomponents. In: Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications. SpringerBriefs in Applied Sciences and Technology. Springer, London. https://doi.org/10.1007/978-1-4471-5541-6_8

Download citation

  • DOI: https://doi.org/10.1007/978-1-4471-5541-6_8

  • Published:

  • Publisher Name: Springer, London

  • Print ISBN: 978-1-4471-5540-9

  • Online ISBN: 978-1-4471-5541-6

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics

Search

Navigation