A New Sinusoidal Phase Modulation Interferometry

  • Ying-Chun Ran
  • Guo-Tian He
  • Yan Ma
  • Ying-Ying Qi
  • Song Wang
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 216)


Sinusoidal phase modulation (SPM) interferometer is a time phase modulation method, which has strong anti-jamming ability and needs higher CCD frame rate, so ordinary CCD do not meet the requirement. This article proposed a new interval sampling based on SPM. When SPM modulating signal frequency was 200 Hz, preset sampling frequency was 2,000 Hz; area array CCD with 182 Hz frame rate only collected an interference image in a modulation cycle, and then, these collected images are processed using 2,000 Hz CCD frame rate, thereby reducing the CCD frame rate. This article processed simulation and extracted phase principle values of interference images with filtering method, and by joining main interference signal in the work environment, the error analysis proved that interval sampling could improve the anti-jamming ability of SPM interferometer in the measurement of object surface topography.


Interferometer Sinusoidal phase modulation Interval sampling 



This paper got the following project supports: the national 863 project “major projects with high intelligent analysis instrument online and complete system key technology research and product development” items (2012 AA040603), Chongqing major projects “high temperature flue gas more than high precision components online intelligent monitoring system research” (cstc2011ggC70001) and Chongqing municipal education commission–funded project (KJ110601, KJ100605, KJ090820). Through this, authors wish to thank all.


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Copyright information

© Springer-Verlag London 2013

Authors and Affiliations

  • Ying-Chun Ran
    • 1
    • 2
  • Guo-Tian He
    • 1
    • 2
  • Yan Ma
    • 3
  • Ying-Ying Qi
    • 3
  • Song Wang
    • 3
  1. 1.Chongqing Institute of Green and Intelligent TechnologyChinese Academy of SciencesBeijingChina
  2. 2.College of Computer and Information ScienceChongqing Normal UniversityChongqingChina
  3. 3.Chongqing Normal UniversityChongqingChina

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