Advertisement

Characterization and Use of Nanostructured Tools

  • Mark J. Jackson
Chapter
Part of the SpringerBriefs in Applied Sciences and Technology book series (BRIEFSAPPLSCIENCES)

Abstract

Chemical vapor deposited diamond films have many industrial applications but are assuming increasing importance in the area of microfabrication, most notably in the development of diamond-coated micro-tools especially for milling and turning. For these applications the control of structure and morphology is of critical importance. The crystallite size, orientation, surface roughness, and the degree of sp3 character have a profound effect on the machining properties of the films deposited. In this chapter experimental results are presented on the effects of nitrogen doping on the surface morphology, crystallite size, and wear of micro-tools. The sp3 character optimises at 200 ppm of nitrogen and above this value the surface becomes much smoother and crystal sizes decrease considerably.

Keywords

Rake Angle Diamond Film Rake Face Maximum Tensile Stress Force Ratio 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgments

The author acknowledges permission to reproduce the chapter from the following publications: ?Machining with Nanomaterials?, Edited by M. J. Jackson and J. S. Morrell, Chapter 10, ?Manufacture and Development of Nanostructured Diamond Tools? by M. J. Jackson, W. Ahmed, and J. S. Morrell pp. 325?360, re-printed with kind permission from Springer Science+Business Media B.V. (Permission Received February 22, 2012), and ?Characterization from N-doped polycrystalline diamond films deposition to micro tools?, by M. J. Jackson and W. Ahmed, Journal of Materials Engineering and Performance, Vol. 14 (5), 2005, pp. 654?665 (Springer License# 2944340724659?Issued 8th July 2012).

References

  1. 1.
    Fan QH, Periera E, Gracio J (1998) Time modulated CVD diamond processing of diamond. J Mater Res 13(10):2787?2794Google Scholar
  2. 2.
    May P, Rego CA, Thomas RM, Ashfold MNR, Rosser KN, Everitt NM (1994) CVD diamond wires and tubes. Diam Relat Mater 3:810?813CrossRefGoogle Scholar
  3. 3.
    Kostadinov L, Dobrev D, Okano K, Kurosu T, Iida M (1992) Nuclear and growth of diamond from the vapor phase. Diam Relat Mater 1:157?160CrossRefGoogle Scholar
  4. 4.
    Ali N, Ahmed W, Hassan IU, Rego CA (1998) Surface engineering of diamond coated tools. Surf Eng 14(4):292Google Scholar
  5. 5.
    Beckmann R, Kulisch W, Frenck HJ, Kassing R (1992) Influence of gas phase parameters on diamond kinematics of thin diamond films deposited by MWCVD and HFCVD techniques. Diam Relat Mater 1:164?167CrossRefGoogle Scholar
  6. 6.
    Ojika SI, Yamoshita S, Ishikura T (1998) Diamond growth on copper substrate. Jpn J Appl Phys 32(2):L1681?L1683CrossRefGoogle Scholar
  7. 7.
    Muller-Serbert W, Worner E, Fuchs F, Wild C, Koidl P (1996) Nitrogen induced increase in growth rate in CVD diamond. Appl Phys Lett 68(6):759?760CrossRefGoogle Scholar
  8. 8.
    Bohr B, Haubner R, Lux B (1996) Influence of nitrogen additions on HFCVD diamond. Appl Phys Lett 68(8):1075?1077CrossRefGoogle Scholar
  9. 9.
    Yarbrough WA, Messier R (1988) Diamond deposition to silicon. Science 247:688Google Scholar
  10. 10.
    Kanetkar SM, Metera G, Chen X, Pramanick S, Tiwari P, Narayan J, Pfei!er G, Paesler M (1991) Growth of diamond on silicon substrates. J Elect Mater 20:4Google Scholar
  11. 11.
    Wolter SD, Stoner BR, Glass JT, Ellis PJ, Jenkins DS, Southworth P (1993) Textured growth of diamond on silicon via in situ carburisation and bias enhanced nucleation. Appl Phys Lett 62:1215?1217CrossRefGoogle Scholar
  12. 12.
    Jiang X, Klages CP, Zachia R, Hartureg M, Fuser HJ (1993) Epitaxial diamond films on (001) silicon substrates. Appl Phys Lett 62:3438?3440CrossRefGoogle Scholar
  13. 13.
    Stubhan F, Ferguson M, Fusser HJ, Behom RJ (1995) Heteroepitaxial nucleation of diamond on Si (001) in HFCVD. Appl Phys Lett 66:1900?1902CrossRefGoogle Scholar
  14. 14.
    Li X, Hayashi Y, Nishino S (1997) Analysis of oriented diamond nucleation processes on silicon substrates by HFCVD. Jpn J Phys 36:5197?5201CrossRefGoogle Scholar
  15. 15.
    Locher R, Wild C, Herres N, Behr D, Koidl P (1994) Nitrogen stabilized <100> texture in CVD diamond films. Appl Phys Lett 65:34?36CrossRefGoogle Scholar
  16. 16.
    Jin S, Moustakas TD (1994) Effect of nitrogen on the growth of diamond films. Appl Phys Lett 65:403?405CrossRefGoogle Scholar
  17. 17.
    Borst TH, Munzinger PC, Weiss O (1994) Characterization of undoped and doped homoepitaxial diamond layers produced by microwave plasma CVD. Diam Relat Mater 3:515?519CrossRefGoogle Scholar
  18. 18.
    Koizumi S, Kamo M, Sato Y, Mita S, Sauabe A, Reznik C (1998) Growth and characterization of phosphorous doped n-type diamond films. Diam Relat Mater 7:540?544CrossRefGoogle Scholar
  19. 19.
    Tarasov LP (1951) Grindability of tool steels. Am Soc Metals 43:1144?1151Google Scholar
  20. 20.
    Tonshoff HK, Grabner T (1984) Cylindrical and profile grinding with boron nitride wheels. Proceedings of the 5th international conference on production engineering, Japanese Society of Precision Engineers, p 326Google Scholar
  21. 21.
    Malkin S, Cook NH (1971) The wear of grinding wheels?Part 1: attritious wear. Trans ASME J Eng Ind 93:1120?1128Google Scholar
  22. 22.
    Jackson MJ (2001) Vitrification heat treatment during the manufacture of corundum grinding wheels. J Manuf Process 3:17?28Google Scholar
  23. 23.
    Timoshenko SP, Goodier JN (1970) Theory of elasticity, 3rd edn.?International Student Edition. McGraw-Hill Kogakusha Ltd., New York, pp 109?113 and 139?144Google Scholar
  24. 24.
    King AG, Wheildon WM (1966) Ceramics in machining processes. Academic Press, New YorkGoogle Scholar
  25. 25.
    Griffith AA (1921) The phenomena of rupture and flow in solids. Philos Trans R Soc Lond A221:163?198Google Scholar
  26. 26.
    Loladze TN (1967) Requirements of tool materials. Proceedings of the 8th international machine tool design and research conference. Pergamon Press, pp 821?842Google Scholar

Copyright information

© The Author(s) 2013

Authors and Affiliations

  1. 1.High Performance MaterialsSaint-Gobain AbrasivesNorthboroughUSA

Personalised recommendations