Integrated Sensor Systems for Advanced Machines
Although much effort has been spent on generating vision-based sensors and haptic systems capable of working together for high level control approaches, the development of practical sensor networks, tailored to monitor the internal state of high performance machines, has received less attention.
The MEMS-based, electrostatic-microarray approach described in this paper has been used to design and manufacture a variety of silicon-based sensors and networks for the measurement of key machine parameters. This paper focuses on four example systems which are currently being developed to monitor strain, multi-axis strain and rotation in robots, aircraft, submarines, and railroad assets.
KeywordsTitanium Quartz Dust Torque Convolution
Unable to display preview. Download preview PDF.
- Jacobsen S.C., et. al., Field-based Microsystems for Strain Measurement, Proc. ASME Winter Annual Meeting, November, Chicago, IL (1988).Google Scholar
- Jacobsen S.C., et. al., Field-Based State Sensing in Micro-Motion Systems, in Integrated Micro-Motion Systems — Micromachining, Control, and Applications, F. Harashima, Ed., Elsevier Science Publishers (1990).Google Scholar
- Jacobsen S.C., Olivier M., Maclean B.J, et. al., Multi-Regime Integrated Transducer Networks, Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, June 8–11, 1998.Google Scholar
- Maclean B.J., Mladejovsky M.G., Whitaker M.R., et. al., A Digital MEMS-Based Strain Gage for Structural Health Monitoring, in Proceedings of Material Research Society Symposium, Boston, MA, Dec. 1–5 (1997).Google Scholar