Skip to main content

What can MEMS do for Robotics?

  • Conference paper

Abstract

This paper deals with the latest development of MEMS(micro electro mechanical systems) and its application to robotics. The MEMS technology is expected to have impacts on Robotics in three ways: (1) providing sensors and actuators, (2) introducing a new intelligent system concept, such as an autonomous distributed systems, and (3) realizing micro robots. Bacis ideas and some examples are discussed.

Keywords

  • Shape Memory Alloy
  • Atomic Force Micro
  • Shape Memory Alloy Actuator
  • Miniature Robot
  • Shear Stress Sensor

These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

This is a preview of subscription content, access via your institution.

Buying options

Chapter
USD   29.95
Price excludes VAT (USA)
  • DOI: 10.1007/978-1-4471-0765-1_46
  • Chapter length: 7 pages
  • Instant PDF download
  • Readable on all devices
  • Own it forever
  • Exclusive offer for individuals only
  • Tax calculation will be finalised during checkout
eBook
USD   109.00
Price excludes VAT (USA)
  • ISBN: 978-1-4471-0765-1
  • Instant PDF download
  • Readable on all devices
  • Own it forever
  • Exclusive offer for individuals only
  • Tax calculation will be finalised during checkout
Softcover Book
USD   139.00
Price excludes VAT (USA)

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. R.T. Howe, R.S. Muller, K.J. Gabriel, and W.S.N. Trimmer, “Silicon Micromechanics: Sensors and Actuators on a Chip”, IEEE Spectrum, June 1991, pp. 29–35.

    Google Scholar 

  2. K.J. Gabriel, “Engineering Microscopic Machines”, Scientific American, vol. 260, no.9, pp. 118–121 (1995.9).

    Google Scholar 

  3. H. Fujita, “Microactuators and Micromachines”, Proc. of IEEE, vol. 86, No. 8, August 1998, pp. 1721–1732.

    CrossRef  Google Scholar 

  4. K.J. Gabriel, “MEMS Research Projects in U.S.A.”, J. of JSME, Vol.97, No.905, pp.272–275 (1994) (translated into Japanese)

    Google Scholar 

  5. S. Sugiyama, et al: Tech. Digest Transducers ‘87, Tokyo, Japan (1987) p. 444.

    Google Scholar 

  6. M. Esashi, et al: Trans. IEICE Trans, Vol. J73-C-II (1990) p. 37 (in Japanese)

    Google Scholar 

  7. C-M. Ho, P-H. Huang, J. Law, J. Mai, G-B. Lee, and Y-C. Tai, “MEMS: An Integrated System Capable of Sensing-Computing-Actuating”, 4th Intern’1 Conf. Intelligent Materials, Makuhari, Japan, Oct. 5–7, 1998, p. 300.

    Google Scholar 

  8. T. Niino, S. Egawa, T. Higuchi, IEEE MEMS’94, Ohiso, Japan (1994) p. 130.

    Google Scholar 

  9. Patrice Minotti, Philippe Langlet, Gilles Bourbon and Takahisa Masuzawa, “Design and Characterization of High-Torque/Low-Speed Silicon Based Electrostatic Micromotors Using Stator/Rotor Contact Interactions”, Jpn. J. Appl. Phys., Vol. 37 (1998) pp. L359 - L361

    CrossRef  Google Scholar 

  10. T. Akiyama and K. Shono, “Controlled stepwise motion in Polysilicon microstructures”, J. Microelectromechanical Systems, vol. 2, No. 3 (1993), pp. 106–110.

    CrossRef  Google Scholar 

  11. N. Takeshima and H. Fujita, “Design and Control of Systems with Microactuator Array”, Proc.IEEE Workshop in Advanced Motion Control, Yokohama, Japan (1990) p. 219–232

    Google Scholar 

  12. M. Ataka, A. Omodaka, N. Takeshima and H. Fujita, “Polyimide Bimorph Actuators for a Ciliary Motion System”, IEEE/ASME J. of Microelectromechanical Syst.2, No. 4 (1993) p. 146–150

    CrossRef  Google Scholar 

  13. W. Riethmuller and W. Benecke, “Thermally Excited Silicon Microactuators”, IEEE Trans on Electron Devices, ED-35 (1988) p. 758–763

    Google Scholar 

  14. M. Schmidt, R.T. Home, S. Senturia and J. Haritonidis, “Design and Calibration of a Microfabricated Floating Element Shear-Stress Sensor”, IEEE Trans on Electron Devices, ED-35 (1988) P. 750–757

    Google Scholar 

  15. H.Fujita and K.J.Gabriel, “New Opportunities for Microactuators”, Proc.of 6th International Conference on Solid-state Sensors and Actuators, San Francisco (1991) p.14–20

    Google Scholar 

  16. T. Yasuda, et al: Transducers ‘83, Yokohama, Japan (1993) p. 42.

    Google Scholar 

  17. K. Hoshino, et al: IEEE MEMS’99, Orlando, FL. (1999) P. 429

    Google Scholar 

  18. C.-J. Kim, A.P.Pisano, R.S.Muller, “Silicon-Process Overhanging Microgripper”, IEEE/ASME Jour. of Microelectromechanical Systems, 1 (1992) pp. 31–36.

    CrossRef  Google Scholar 

  19. J. Ok, C.J. Kim: IEEE MEMS’99, Orlando, FL. (1999) p. 459.

    Google Scholar 

  20. H. Miyazaki, T. Sato: IEEE MEMS ‘86, San Diego, CA (1996) p. 318.

    Google Scholar 

  21. E. Higurashi et al: IEEJ/IEEEMOEMS97, Nara, Japan (1997) p. 186.

    Google Scholar 

  22. M. Washizu, et al: IEEE Trans. on IA, vol. 31 (1995) p. 447.

    Google Scholar 

  23. K. Hirano, et al: IEEJ/IEEE MOEMS97, Nara, Japan (1997) p. 195

    Google Scholar 

  24. T.V. Vorburger, et al: Annals of CIRP, vol. 46 /2 (1997) p. 597.

    CrossRef  Google Scholar 

  25. K.T. Park, M. Esashi, IEEE MEMS’99, Orland, FL (1999) p. 400

    Google Scholar 

  26. http://www.iijnet.or.jp/MMC/

  27. T. Higuchi, et al, “Micro Actuators using Recoil of an Ejected Mass”, IEEE Micro Robots and Teleoperators Workshop, Hyannis, MA (1987)

    Google Scholar 

  28. T. Ebfors, et al., “A Walking Silicon Micro-Robot”, Tech. Digest Transducers ‘89, June 7–10, 1999, Sendai, Japan, vol. 2, p. 1202.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and Permissions

Copyright information

© 2000 Springer-Verlag London

About this paper

Cite this paper

Fujita, H. (2000). What can MEMS do for Robotics?. In: Hollerbach, J.M., Koditschek, D.E. (eds) Robotics Research. Springer, London. https://doi.org/10.1007/978-1-4471-0765-1_46

Download citation

  • DOI: https://doi.org/10.1007/978-1-4471-0765-1_46

  • Publisher Name: Springer, London

  • Print ISBN: 978-1-4471-1254-9

  • Online ISBN: 978-1-4471-0765-1

  • eBook Packages: Springer Book Archive