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Robotics Research pp 377–383Cite as

What can MEMS do for Robotics?

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Abstract

This paper deals with the latest development of MEMS(micro electro mechanical systems) and its application to robotics. The MEMS technology is expected to have impacts on Robotics in three ways: (1) providing sensors and actuators, (2) introducing a new intelligent system concept, such as an autonomous distributed systems, and (3) realizing micro robots. Bacis ideas and some examples are discussed.

Keywords

  • Shape Memory Alloy
  • Atomic Force Micro
  • Shape Memory Alloy Actuator
  • Miniature Robot
  • Shear Stress Sensor

These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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  • DOI: 10.1007/978-1-4471-0765-1_46
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Author information

Authors and Affiliations

  1. Institute of Industrial Science, University of Tokyo, 7-22-1 Roppongi, Minato-ku, Tokyo, 106-8558, Japan

    Hiroyuki Fujita

Authors
  1. Hiroyuki Fujita
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Editor information

Editors and Affiliations

  1. Computer Science Department, University of Utah, 50 S. Central Campus Drive, Rm 3190, 84112, Salt Lake City, UT, USA

    John M. Hollerbach

  2. Department of Electrical Engineering & Computer Science, University of Michigan, 1101 Beal Avenue, 48109-2110, Ann Arbor, MI, USA

    Daniel E. Koditschek

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© 2000 Springer-Verlag London

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Fujita, H. (2000). What can MEMS do for Robotics?. In: Hollerbach, J.M., Koditschek, D.E. (eds) Robotics Research. Springer, London. https://doi.org/10.1007/978-1-4471-0765-1_46

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  • DOI: https://doi.org/10.1007/978-1-4471-0765-1_46

  • Publisher Name: Springer, London

  • Print ISBN: 978-1-4471-1254-9

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