Abstract
This chapter illustrates the identification of control-relevant models and the subsequent robust control design applied to a wafer stage. A wafer stage is part of a wafer stepper and used in chip manufacturing processes for accurate positioning of the silicon wafer on which the chips are to be produced. Accurate and fast positioning requires a robust and high-performance multivariable servo controller that enables a fast throughput of silicon wafers. An advanced servo controller is developed by an iterative procedure of control-relevant model identification including model uncertainty bounding, and robust control based on worst-case performance optimisation. Both stability and performance robustness can be monitored, enabling the possibility of guaranteeing performance improvement in a single step of the iteration. This is shown to lead to a successful design and implementation on a wafer stage set-up.
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© 2002 Springer-Verlag London
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de Callafon, R.A., Van den Hof, P.M.J. (2002). Control-relevant Identification and Robust Motion Control of a Wafer Stage. In: Albertos, P., Sala, A. (eds) Iterative Identification and Control. Springer, London. https://doi.org/10.1007/978-1-4471-0205-2_12
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DOI: https://doi.org/10.1007/978-1-4471-0205-2_12
Publisher Name: Springer, London
Print ISBN: 978-1-4471-1098-9
Online ISBN: 978-1-4471-0205-2
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