Abstract
Sources of environmental impacts in IC production and use include emissions from electricity generation and fuel incineration as well as direct process emissions at manufacturing sites. Looking upstream, environmental impacts also occur due to process heating, electricity generation, and direct emissions in several additional life-cycle stages, including production and purification of silicon, infrastructure construction, equipment manufacturing and chemicals production. Transportation also contributes to impacts as a component of these upstream life-cycle stages, and as a stage of its own, when wafers are conveyed from the wafer fabrication facility to the assembly plant and chips are transported to the point of use. Figure 2.1 depicts the sequence of some of the key life-cycle stages for a semiconductor product, as well as some environmentally significant ancillary stages.
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Boyd, S.B. (2012). Semiconductor LCI Methods. In: Life-Cycle Assessment of Semiconductors. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-9988-7_2
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DOI: https://doi.org/10.1007/978-1-4419-9988-7_2
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