Observer Approach for Parameter and Force Estimation in Scanning Probe Microscopy

Abstract

This chapter discusses a possible state-observer approach for various estimation problems arising in the context of so-called Scanning Probe Microscopes. The discussion is based on the example of the Electric Force Microscope. It is first emphasized how a typical force measurement purpose can be formulated as a model-based state observer problem, for which some standard Kalman observer can for instance be designed. The notion of parametric amplification sometimes used in order to enhance force measurement accuracy is then interpreted in the light of the here discussed observer approach. Finally, the issue of parameter estimation for this model-based approach is also discussed. All of those items are illustrated with the considered example and corresponding simulation results.