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Nanoindentation Instrumentation

  • Anthony C. Fischer-CrippsEmail author
Chapter
Part of the Mechanical Engineering Series book series (MES)

Abstract

Interest in nanoindentation has spawned a number of nanoindentation instruments that compete on a world market. Purchasers of such instruments are usually universities, private and government research organisations, and quality control laboratories. There is particular interest within the semiconductor industry that is concerned with the mechanical properties of a wide range of thin films.

Keywords

Displacement Sensor Scratch Testing Depth Sensor Reference Probe Lead Screw 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

  1. 1.
    Hystron Corporation, 10025 Valley View Rd, Minneapolis, MN 55344 USAGoogle Scholar
  2. 2.
    Micromaterials Ltd, Willow House, Yale Business Park, Ellice Way, Wrexham LL137YL UKGoogle Scholar
  3. 3.
    Fischer-Cripps Laboratories Pty Ltd, P.O. Box 9, Forestville NSW 2087 AustraliaGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  1. 1.Fischer-Cripps Laboratories Pty Ltd.Killarney HeightsAustralia

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