Abstract
Commercialization of a whole spectrum of useful MEMS is still hindered by surface phenomena that dominate at the micron scale. Altering the roughness and surface chemistry of MEMS surfaces by depositing nanoparticles on them is being considered by the MEMS community as a useful strategy to address tribological issues. Although, gold nanoparticle monolayer is reported to reduce adhesion in MEMS, determining its surface coverage still remains a challenge [1]. A technique to determine the surface coverage of deposited gold nanoparticles is needed, so that its effect on the tribology of MEMS surfaces can be studied.
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Hurst, K. M., Roberts, C. B., Ashurst, W. R., “A gas-expanded liquid nanoparticle deposition technique for reducing the adhesion of silicon microstructures”, Nanotechnology, 20(18), 185303(9pp), 2009.
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© 2011 Springer Science+Business Media, LLC
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Ansari, N., Hurst, K.M., Ashurst, W.R. (2011). Estimating surface coverage of gold nanoparticles deposited on MEMS. In: Proulx, T. (eds) Experimental and Applied Mechanics, Volume 6. Conference Proceedings of the Society for Experimental Mechanics Series. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-9792-0_10
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DOI: https://doi.org/10.1007/978-1-4419-9792-0_10
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