Skip to main content
SpringerLink
Log in

Soft Lithography and Imprint-Based Techniques for Microfluidics and Biological Analysis

  • Chapter
Alternative Lithography

Part of the book series: Nanostructure Science and Technology ((NST))

Abstract

In the past decade, microfabrication has become increasingly important to biology and biomedical applications. The fabrication techniques initially developed for the microelectronics industry, e.g. photolithography and associated material processing, along with the silicon micromachining methods later developed for micro-electromechanical systems (MEMS), are now being applied to the miniaturization and integration of mi-croelectronics and chemical analysis systems.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 129.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. S.P. Fodor, R.P. Rava, X.C. Huang, A.C. Pease, C.P. Holmes, C.L. Adams, Nature, (1993), 364, 555–556.

    CAS  Google Scholar 

  2. R.J. Lipshutz, S.P. Fodor, T.R. Gingeras, D.J. Lockhart, Nature Genetics, (1999), 21, 20–4.

    CAS  Google Scholar 

  3. R.J. Lipshutz, S.P. Fodor, T.R. Gingeras, D.J. Lockhart, Nature Genetics, (1999), 21, 20–4.

    Google Scholar 

  4. M.F. Templin, D. Stoll, M. Schrenk, P.C. Traub, C.F. Vöhringer and T.O. Joos, Trends Biotechnol, (2002), 20, 160–166.

    CAS  Google Scholar 

  5. see proceedings from the μTAS international conferences: Micro Total Analysis Systems 2001, J. M. Ramsey and A. Van den Berg (eds), Kluwer, Dortrecht, Netherlands (2001); Micro Total Analysis Systems 2000, A. Van den Berg, W. Olthuis and P. Bergveld (eds), Kluwer, Dortrecht, Netherlands (2000); Micro Total Analysis Systems ’98, D.J. Harrison, A. Van den Berg (eds), Kluwer, Dortrecht, Netherlands (1998); Micro Total Analysis Systems, A. Van den Berg, P. Bergveld (eds), Kluwer, Dortrecht, Netherlands (1994).

    Google Scholar 

  6. Microsystem Technology in Chemistry and Life Sciences, A. Manz and H. Becker (eds), Berlin, Germany, Springer-Verlag (1998).

    Google Scholar 

  7. Microfluidic Technology and Applications, M. Koch, A. Evans and A. Brunnschweiler, Microtechnologies and Microsystems Series, R. Pethig (ed), Baldock England, Research Studies Press Ltd. (2000).

    Google Scholar 

  8. See Lab-on-a-chip journal, Royal Society of Chemistry (first issue October 2001).

    Google Scholar 

  9. www.calipertech.comwww.chem.agilent.comwww.aclara.comwww.gyros.comwww.cepheid.comwww.micralyne.comwww.micronics.netwww.nanostream.comwww.tecan.comwww.microparts.dewww.mildendo-fluidics.dewww.greiner-bio-one.cometc

  10. D. J. Harrison, A. Manz, Z. Fan, H. Lüdi, H.M. Widmer, Anal Chem., (1992), 64, 1908–1919.

    Google Scholar 

  11. J. L. Viovy,Rev. Mod. Phys., (2000), 72, 813–872.

    CAS  Google Scholar 

  12. J. Han and H. G. Craighead, XXXScience, (2000), 288, 1026–1029; J. Han, S. W. Turner, and H. G. Craighead, Phys. Rev. Lett., (1999), 83, 1026–1029.

    Google Scholar 

  13. W. D. Volkmuth and R.H. Austin,Nature, (1992), 358, 600.

    CAS  Google Scholar 

  14. D. Ertas, Phys. Rev. Lett., (1998), 80, 1548.

    CAS  Google Scholar 

  15. S. W. Turner, A. M. Perez, A. Lopez and H.G. Craighead, XXXJ. Vac.Sci & Technol,, (1998), B 16, 3835.

    CAS  Google Scholar 

  16. D. R. Larson, M. Levene, S. W. Turner, H. G. Craighead, and W. W. Webb, Biophys. J. 80 Part 2, (2001), 65509.

    Google Scholar 

  17. M.E. Foquet, S.W. Turner, J. Korlach, W.W. Webb and H.G. Craighead, Micro Total Analysis Systems 2000, A. Van den Berg, W. Olthuis and P. Bergveld (eds), Kluwer, Dortrecht, Netherlands, p. 549–552 (2000).

    Google Scholar 

  18. Y.N. Xia and G.M. Whitesides. Angew. Chem. Int. Ed. Engl., (1998), 37, 550.

    CAS  Google Scholar 

  19. www.fluidigm.com

  20. T.D. Boone, A. J. Ricco, Z.H. Fan, H. Tan, H.H. Hooper and S.J. Williams, Anal. Chem., (2002), 74, 78A–86A.

    CAS  Google Scholar 

  21. H. Becker and L.E. Locascio, Talanta, (2002), 56, 267–287.

    CAS  Google Scholar 

  22. A.de Mello, Lab on a Chip 2, 31N–36N (2002).

    Google Scholar 

  23. H. Becker and C. Gartner, Electrophoresis 21, (2000), (1), 12–26.

    CAS  Google Scholar 

  24. S.Y. Chou, P.R. Krauss and P.J. Renstrom, Appl. Phy. Lett., 1995), 76, 3114.

    Google Scholar 

  25. M.A. Roberts, J.S. Rossier, P. Bercier, H. Girault, Anal. Chem., (1997), 69, 2035–2042.

    CAS  Google Scholar 

  26. J.S. Rossier, A. Schwarz, F. Reymond, R. Ferrigno, F. Bianchi and H.H. Girault,Electrophoresis, (1999), 20,727–731.

    CAS  Google Scholar 

  27. P.M. Martin, D.W. Watson, W.D. Bennett, Y. Lin and D.J. Hammerstrom,J. Vac. Sci. TechnoL, (1999), A 17, 2264.

    CAS  Google Scholar 

  28. J.S. Rossier, F. Reymond, and P.E. Michel, Electrophoresis, (2002), 23, 858–867.

    CAS  Google Scholar 

  29. D.J. Beebe, J.S. Moore, J.M. Bauer, Y. Qing, R.H. Liu, C. Devadoss and B-H. Jo, Nature, (2000), 404, 588–590.

    CAS  Google Scholar 

  30. D.J. Beebe, J.S. Moore, Q. Yu, R.H. Liu, M.L. Kraft, B-H. Jo, C. Devadoss, Proc. Natl Acad. Sci. USA 97, (2000), (25), 13488–13493.

    CAS  Google Scholar 

  31. A. Bertsch, S. Heimgartner, P. Cousseau and P. Renaud, Lab on a Chip, 1, (2002), 56–60.

    Google Scholar 

  32. S. M. Ford, B. Kar, S. Mcwhorter, J. Davies, S.A. Soper, M. Klopf, J. Calderon and V. Saile, J. Microcolumn Sep., (1998), 10, 413–422.

    CAS  Google Scholar 

  33. M. Ueda, Y. Kiba, H. Abe, A. Arai, H. Nakanishi, and Y. Baba, Electrophoresis, (2000), 21, 176.

    CAS  Google Scholar 

  34. A. Bertsch, P. Bernhard, C. Vogt, P. Renaud,Rapid Prototyping 6, (2000), (4), 259.

    Google Scholar 

  35. G.M. Whitesides and A.D. Stroock, Physics Today 54, (2001), (6), 42.

    CAS  Google Scholar 

  36. G.M. Whitesides, E. Ostuni, S. Takayama, X. Jiang and D. E. Ingber, XXXAnnu. Rev. Biomed. Eng., 3, (2001), 335–373.

    CAS  Google Scholar 

  37. H. Schmid and B. Michel, Macromolecules, (2000), 33, 3042.

    CAS  Google Scholar 

  38. B. Michel et al. IBM J. Res. & Dev., (2001), 45, 697–719.

    CAS  Google Scholar 

  39. V. Studer, A. Pépin, and Y. Chen, Appl. Phys. Lett., 80, May 13 (2002), (19).

    Google Scholar 

  40. D.C. Duffy, J.C. McDonald, O.J.A. Schueller and G.M. Whitesides, Anal. Chem., 70, (1998), 4974–4984.

    CAS  Google Scholar 

  41. X. Ren, M. Bachman, C. Sims, G.P. Li, N. Allbritton, J. Chromatogr. B., (2001), 762, 117–125.

    CAS  Google Scholar 

  42. H-P. Chou, C. Spence, A. Scherer and S.R. Quake, Proc. Natl. Acad. Sci., (1999), USA 96, 11–13.

    CAS  Google Scholar 

  43. K.W. Ro, K. Lim, H. Kim and J.H. Hahn, Electrophoresis, (2002), 23, 1129–1137.

    CAS  Google Scholar 

  44. A. Tan, K. Rodgers, J.P. Murrihy, C. O’Mathuna and J.D. Glennon,Lab on a Chip, (2002),1, 7–9.

    Google Scholar 

  45. J.C. McDonald, M.L. Chabinyc, S.J. Metallo, J.R. Anderson, A.D. Stroock and G.M. Whitesides, Anal. Chem., (2002), 74, 1537–1545.

    CAS  Google Scholar 

  46. M.A. Unger, H-P. Chou, T. Thorsen, A. Scherer and S.R. Quake,Science, (2000), 288, 113–116.

    CAS  Google Scholar 

  47. S. R. Quake and A. Scherer, Science, (2000), 290, 1536.

    CAS  Google Scholar 

  48. J. Liu, M. Enzelberger and S. Quake,Electrophoresis, (2002), 23, 1531–1536.

    CAS  Google Scholar 

  49. A.D. Stroock, S.K.W. Dertinger, A. Ajdari, I. Mezic, H.A. Stone, G.M. Whitesides,Science, (2002), 295, 647–651.

    CAS  Google Scholar 

  50. A.D. Stroock, S.K.W. Dertinger, G.M. Whitesides, A. Ajdari, to be published in XXXAnal. Chem. (2002).

    Google Scholar 

  51. M. Oddy, J.G. Santiago and J.C. Mikkelsen, Anal. Chem., (2001), 73, 5822–5832.

    CAS  Google Scholar 

  52. C. Donzel, M. Geissler, A. Bernard, H. Wolf, B. Michel, J. Hilborn and E. Delamarche, Adv. Mater., (2001), 13 (15), 1164–1167.

    CAS  Google Scholar 

  53. Y. Lui, J.C. Fanguy, J.M. Bledsoe and C.S. Henry, Anal. Chem., (2000), 72, 5939–5944.

    Google Scholar 

  54. B. Ekström, G. Jacobson, O. Ohman, H. Sjodin, PCT 91/16966 (1991).

    Google Scholar 

  55. C.S. Effenhauser, G.J.M. Bruin, A. Paulus, M. Ehrat, Anal. Chem., (1997), 69, 3451–3457.

    CAS  Google Scholar 

  56. J.C. McDonald, D.C. Duffy, J.R. Anderson, D.T. Chiu, H. Wu, O.J.A. Schueller and G.M. Whitesides, Electrophoresis, (2000), 21, 27–40.

    CAS  Google Scholar 

  57. P.S. Doyle, J. Bibette, A. Bancaud, and J. L. Viovy, Science, (2002), 295, 2237.

    CAS  Google Scholar 

  58. H-P. Chou, C. Spence, A. Scherer and S.R. Quake, Proc. Natl. Acad. Sci. USA, (1999), 96, 11–13.

    CAS  Google Scholar 

  59. A.Y. Fu, C. Spence, A. Scherer, F.H. Arnold and S.R. Quake, Nature Biotechnology, (1999), 17, 1109–1111.

    CAS  Google Scholar 

  60. A.Y. Fu, H-P Chou, C. Spence, F.H. Arnold and S.R. Quake, Anal. Chem., (2002), 74, (11), 2451–2457.

    CAS  Google Scholar 

  61. J.H. Chan, A.T. Timperman, D. Qin and R. Aebersold, Anal. Chem., (1999), 71, 4437.

    CAS  Google Scholar 

  62. J.S. Kim and D.R. Knapp, Micro Total Analysis Systems 2001, J. M. Ramsey and A. Van den Berg (eds), Kluwer, Dortrecht, Netherlands, p.333–334 (2001) and references therein

    Google Scholar 

  63. M. Seki, M. Yamada, R. Ezaki, R. Aoyama and J.W. Hong, Micro Total Analysis Systems 2001, J. M. Ramsey and A. Van den Berg (eds), Kluwer, Dortrecht, Netherlands, p.48 (2001).

    Google Scholar 

  64. V. Studer, A. Pépin, Y. Chen and A. Ajdari, XXXMicroelectron. Eng. (2002) in press

    Google Scholar 

  65. A. Ajdari, Phys. Rev. E, (2000), 61, R45.

    CAS  Google Scholar 

  66. A. Aidari, Appl. Phys. A, 75, (2002), 271–274.

    Google Scholar 

  67. A.B.D. Brown, C.G. Smith and A.R. Rennie, Phys. Rev. E, 63, (2001), 016305.

    CAS  Google Scholar 

  68. G.M. Whitesides, J.P. Mathias, C.T. Seto,Science, (1991), 254, 1312–1319.

    CAS  Google Scholar 

  69. M. Mrksich, Cell. Mold. Life. Sci., (1998), 54, 653–662.

    CAS  Google Scholar 

  70. A. Bernard, E. Delamarche, H. Schmid, B. Michel, H.R. Bosshard, H.A. Biebuyck, Langmuir, (1998), 14, 2225–2229.

    CAS  Google Scholar 

  71. A. Bernard, J.P. Renault, B. Michel, H.R. Bosshard and E. Delamarche, Adv. Mater. 12, (2000), 1067.

    CAS  Google Scholar 

  72. C.D. James, R.C. Davis, L. Kam, H.G. Craighead, M. Isaacson, J.N. Turner and W. Shain, Langmuir, (1998), 14,741.

    CAS  Google Scholar 

  73. A. Bernard, D. Fitzli, P. Sonderegger, E. Delamarche, B. Michel, H.R. Bosshard and H. Biebuyck, Nature Biotechnology, (2001), 19, 866–869.

    Google Scholar 

  74. A.D. Stroock, M. Weck, D.T. Chiu, W.T.S. Huck, P.J.A. Kenis, R.F. Ismagilov, and G.M. Whitesides, Phys. Rev. Lett., (2000), 84, 3314–3317.

    CAS  Google Scholar 

  75. E. Delamarche, A. Bernard, H. Schmid, A. Bietsch, B. Michel, H.A. Biebuyck, Science, (1997), 276, 779–781.

    CAS  Google Scholar 

  76. E. Delamarche, A. Bernard, H. Schmid, A. Bietsch, B. Michel, H.A. Biebuyck, J. Am. Chem. Soc. (1998), 120, 500–508.

    CAS  Google Scholar 

  77. A. Bernard, B. Michel and E. Delamarche, Anal. Chem., (2001), 73, (1), 8–12.

    CAS  Google Scholar 

  78. A. Papra, A. Bernard, D. Juncker, N.B. Larsen, B. Michel and E. Delamarche, Langmuir, (2001), 17, 4090–4095.

    CAS  Google Scholar 

  79. P.J.A. Kenis, R.F. Ismagilov and G.M. Whitesides, Science, (1999), 285, 83–85.

    CAS  Google Scholar 

  80. S. Takayama, E. Ostuni, P. Leduc, K. Naruse, D.E. Ingber and G.M. Whitesides, Nature, (2001), 411, 1016.

    CAS  Google Scholar 

  81. D.T. Chiu, N.L. Jeon, S. Huang, R.S. Kane, C.J. Wargo, I.S. Choi, D. E. Ingber and G.M. Whitesides, Proc. Natl. Acad. Sci. USA, (2000), 97(6), 2408–2413.

    CAS  Google Scholar 

  82. H-P. Chou, M. A. Unger, A. Scherer and S.R. Quake, XXXProceedings of the Solid State Actuator and Sensor Workshop, Hilton Head, S.C. USA (2000).

    Google Scholar 

  83. P.J. Schneider and H. Engelhardt, J. Chromatogr. A 802, 17–22 (1998).

    CAS  Google Scholar 

  84. D. Ross, T.J. Johnson, and L. Locascio, Anal. Chem., (2001), 73, 2509–2515.

    CAS  Google Scholar 

  85. A.C. Henry, E.A. Waddell, R. Shreiner and L. Locascio, Electrophoresis, (2002), 23, 791–798.

    CAS  Google Scholar 

  86. Z. Wu, N. Xianthopoulos, F. Reymond, J.S. Rossier and H. Girault, Electrophoresis, (2002), 23, 782–790.

    CAS  Google Scholar 

  87. Y. Liu, D. Ganser, A. Schneider, R. Liu, P. Grodzinski and N. Kroutchinina,Anal. Chem., (2001), 73, 4196–4201.

    CAS  Google Scholar 

  88. R.L. McCarley, A.C. Henry, A. Smith, B. Vaidya, M. Galloway, Y. Wang and S. A. Soper, Micro Total Anal-ysis Systems 2001, J. M. Ramsey and A. Van den Berg (eds), Kluwer, Dortrecht, Netherlands, p.607–609 (2001) and references therein

    Google Scholar 

  89. D.S. Soane, Z.M. Soane, US Patent 5, 126, 022 (1992).

    Google Scholar 

  90. C. Backhouse, M. Caamano, F. Oaks, E. Nordman, A. Carrillo, B. Johnson, S. BayElectrophoresis, (2000), 21, 150–156.

    CAS  Google Scholar 

  91. Y. Chen and A. Pépin,Electrophoresis, (2001), 22, 187–207.

    CAS  Google Scholar 

  92. A. Lebib, Y. Chen, E. Cambril, P. Youinou, V. Studer, M. Natali and A. Pépin, XXXMicroelectron. Eng. (2002) in press

    Google Scholar 

  93. M. Bender, M. Otto, B. Hadam, B. Vratzov, B. Spangenberg, H. Kurz, Microelectron. Eng., (2000), 53, 233.

    CAS  Google Scholar 

  94. Y. Chen, A. Lebib, S. Li, A. Pépin, D. Peyrade, M. Natali and E. Cambril, Eur. Phys. J. Appl. Phys., (2000), 12, 223–229.

    CAS  Google Scholar 

  95. A. Lebib, Y. Chen, F. Carcenac, E. Cambril, L. Manin, L. Couraud and H. Launois Microelectron. Eng., (2000), 53, 175.

    CAS  Google Scholar 

  96. A. Pépin, P. Youinou, V. Studer, A. Lebib and Y. Chen, XXXMicroelectron. Eng. (2002) in press

    Google Scholar 

  97. S.W.P. Turner, M. Cabodi and H.G. Craighead,Phys. Rev. Lett., (2002), 88 (12), 128103.

    CAS  Google Scholar 

  98. H. Cao, J. Tegenfeldt, L. Wanli, Z-N Yu, R.H. Austin and S. Y. Chou,March Meeting 2002, Indianapolis, USA (2002).

    Google Scholar 

  99. B. Straub, E. Meyer and P. Fromherz,Nature Biotechnol, (2001), 19, 121–124.

    CAS  Google Scholar 

  100. J. Xu, L. Locascio, M. Gaitan and C.S. Lee,Anal. Chem., (2000), 72, 1930–1933.

    CAS  Google Scholar 

  101. O. Rossier, V. Studer, A. Pepin and Y. Chen, unpublished results

    Google Scholar 

  102. A. Pépin, unpublished results

    Google Scholar 

  103. M.B. Wabuyele, S. M. Ford, W. Stryjewski, J. Barrow and S. Soper,Electrophoresis, (2001), 22, 3939–3948.

    CAS  Google Scholar 

  104. L. Martynova, L. Locascio, M. Gaitan, G.W. Kramer, R.G. Christensen and W.A. Maccrehan,Anal. Chem., (1997), 69, 4783.

    CAS  Google Scholar 

  105. S.L. Barker, M.L. Tarlov, H. Canavan, J.J. Hickman, L.E. Locascio,Anal. Chem., (2000), 72, 4899–4903.

    CAS  Google Scholar 

  106. M. Pumera, J. Wang, F. Opekar, I. Jelínek, J. Feldman, H. Lowe, and S. Hardt,Anal. Chem., (2002), 74 (9), 1968–1971.

    CAS  Google Scholar 

  107. J. Wang, M. Pumera, M.P. Chatrathi, A. Escarpa, R. Konrad, A. Griebel, W. Dörner and H. Lowe,Electrophoresis, (2002), 23, 596–601.

    CAS  Google Scholar 

  108. T.J. Johnson, D. Ross, and L.E. Locascio,Anal. Chem., (2002), 74, 45–51.

    CAS  Google Scholar 

  109. J. Kameoka, H.G. Craighead, H. Zhang, J. Henion,Anal. Chem., (2001), 73, 1935–1941.

    CAS  Google Scholar 

  110. H. Schift, C. David, M. Gabriel, J. Gobrecht, L.J. Heydermann, W. Kaiser, S. Köppel and L. Scandella,Microelectron. Ens,. (2000), 53, 171–174.

    CAS  Google Scholar 

  111. D. Maclntyre and S. Thomas,Microelectron. Eng., (1998), 41/42 211–214.

    Google Scholar 

  112. R.M. McCormick, R.J. Nelson, M.G. Alonso-Amigo, D.J. Benvegnu, and H.H. Hopper,Anal. Chem., (1997), 69, 2626–2630.

    CAS  Google Scholar 

  113. Q. Xue, A. Wainright, S. Gangakhedkar, I. Gibbons,Electrophoresis, (2001), 22, 4000–4007.

    CAS  Google Scholar 

  114. A. Palm, S.R. Wallenborg, M. Gustafsson, A. Hedström, E. Togan-Tekin and P. Andersson, Micro Total Analysis Systems 2001, J. M. Ramsey and A. Van den Berg (eds), Kluwer, Dortrecht, Netherlands, p. 216–218 (2001).

    Google Scholar 

  115. R. Ehrnström,Lab on a Chip 2, 26N–30N (2002).

    Google Scholar 

  116. M. Svedberg, A. Pettersson, F. Nikolajeff and K. Markides, Micro Total Analysis Systems 2001, J. M. Ramsey and A. Van den Berg (eds), Kluwer, Dortrecht, Netherlands, p.335–336 (2001).

    Google Scholar 

  117. K.F. Buechler, P. McPherson, J. Anderberg, K. Nakamura, S. Lesefko and B. Noar, Micro Total Analysis Systems 2001, J. M. Ramsey and A. Van den Berg (eds), Kluwer, Dortrecht, Netherlands, p.42–44 (2001).

    Google Scholar 

  118. S.C. Jacobson, J. P. Alarie and J.M. Ramsey, Micro Total Analysis Systems 2001, J. M. Ramsey and A. Van den Berg (eds), Kluwer, Dortrecht, Netherlands, p.57 (2001).

    Google Scholar 

  119. A. T. Conlisk, J. McFerran, Z. Zheng and D. Hansford, XXX Anal. Chem., (2002), 74(9), 2139–2150.

    CAS  Google Scholar 

  120. O. Saleh and L.L. Sohn, Micro Total Analysis Systems 2001, J. M. Ramsey and A. Van den Berg (eds), Kluwer, Dortrecht, Netherlands, p.54 (2001).

    Google Scholar 

  121. K. Haupt and K. Mosbach,Trends Biotechnol, (1998), 16, 468.

    CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Laboratoire de Photonique et de Nanostructures (LPN), Centre National de la Recherche Scientifique (CNRS), Marcoussis, France

    Anne Pépin & Yong Chen

Authors
  1. Anne Pépin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yong Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. University of Wuppertal, Wuppertal, Germany

    Clivia M. Sotomayor Torres

Rights and permissions

Reprints and permissions

Copyright information

© 2003 Springer Science+Business Media New York

About this chapter

Cite this chapter

Pépin, A., Chen, Y. (2003). Soft Lithography and Imprint-Based Techniques for Microfluidics and Biological Analysis. In: Sotomayor Torres, C.M. (eds) Alternative Lithography. Nanostructure Science and Technology. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-9204-8_17

Download citation

  • DOI: https://doi.org/10.1007/978-1-4419-9204-8_17

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-4836-8

  • Online ISBN: 978-1-4419-9204-8

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation