Abstract
The control of electrical power-distribution (supply) noise continues to be a challenge as the performance of packaged electronics is increasing. To contain power-distribution noise within acceptable limits, the decoupling capacitors are placed as close to the switching circuits as possible, which may or may not be good enough. This chapter discusses the electrical properties and the performance characterization of the thin-film decoupling capacitors, which use dielectrics compatible with the semiconductor processing. The performance advantages offered by the embedded thin-film decoupling capacitors over discrete capacitors are quantified, with experimental emphasis on Ta2O5 dielectrics. The performance of Ta2O5 decoupling capacitors is also compared with that of the SiO2 and Si3N4 capacitors over a range of operating frequencies from dc to 20 GHz.
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Jain, P., Rymaszewski, E.J. (2004). Electrical Characterization. In: Thin-Film Capacitors for Packaged Electronics. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-9144-7_4
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DOI: https://doi.org/10.1007/978-1-4419-9144-7_4
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