Abstract
SOI MOSFETs present the following advantages over bulk devices:
-
absence of latchup in CMOS structures (see chapter 1)
-
higher SEU and soft-error immunity (see chapter 7)
-
reduced parasitic capacitances (see chapter 5)
-
simplified CMOS processing (see chapter 4)
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
Refrences
S.B. Park, Y.W. Kim, Y.G. Ko, K.I. Kim, I.K. Kim, H.S. Kang, J.O. Yu, K.P. Suh, IEEE Journal of Solid-State Circuits, Vol. 34, p. 1436, 1999
M. Canada, C. Akroul, D. Cawlthron, J. Corr, S. Geissler, R. Houle, P. Kartschoke, D. Kramer, P. McCormick, N. Rohrer, G. Salem, L. Warriner, IEEE International Solid-State Circuits Conference, Digest of Technical Papers, p. 430, 1999
A.G. Aipperspach, D.H. Allen, D.T. Cox, N.V. Phan, S.N. Storino, IEEE Journal of Solid-State Circuits, Vol. 34, p. 1430, 1999
S. Geissler, D. Appenzeller, E. Cohen, S. Charlebois, P. Kartschoke, P. McCormick, N. Rohrer, G. Salem, P. Sandon, B. Singer, T. Von Reyn, J. Zimmerman, IEEE International Solid-State Circuits Conference, Digest of Technical Papers, Part Vol. 1, p. 148, 2002
C.N. Keltcher, K.J. McGrath, A. Ahmed, P. Conway, IEEE Micro, Vol. 23, no. 2, p. 66, 2003
K. Shimomura, H. Shimano, N. Sakashita, F. Okuda, T. Oashi, Y. Yamaguchi, T. Eimori, M. Inuishi, K. Arimoto, S. Maegawa, Y. Inoue, S. Komori, K. Kyuma, IEEE Journal of Solid-State Circuits, Vol. 32, p. 1712, 1997
T. Oashi, T. Eimori, F. Morishita, T. Iwamatsu, Y. Yamaguchi, F. Okuda, K. Shimomura, H. Shimano, S. Sakashita, K. Arimoto, Y. Inoue, S. Komori, M. Inuishi, T. Nishimura, H. Miyoshi, Technical Digest of the International Electron Devices Meeting, p. 609, 1996
T. Eimori, T. Oashi, F. Morishita, T. Iwamatsu, Y. Yamaguchi, F. Okuda, K. Shimomura, H. Shimano, N. Sakashita, K. Arimoto, Y. Inoue, S. Komori, M. Inuishi, T. Nishimura, H. Miyoshi, IEEE Transactions on Electron Devices, Vol. 45, p. 1000, 1998
J.W. Park, Y.G. Kim, I.K. Kim, K.C. Park, K.C. Lee, T.S Jung TS, IEEE Journal of Solid-State Circuits, Vol. 34, p. 1446, 1999
Y.H. Koh, M.R. Oh, J.W. Lee, J.W. Yang, W.C. Lee, C.K. Park, J.B. Park, Y.C. Heo, K.M. Rho, B.C. Lee, M.J. Chung, M. Huh, H.S. Kim, K.S. Choi, W.C. Lee, J.K. Lee, K.H. Ahn, K.W. Park, J.Y. Yang, H.K. Kim, D.H. Lee, I.S. Hwang, Technical Digest of International Electron Devices Meeting, p. 579, 1997
Y.W. Kim, S.B. Park, Y.G. Ko, K.I. Kim, I.K. Kim, K.J. Bae, K.W. Lee, J.O. Y, U. Chung, K.P. Suh, Digest of Technical Papers of the IEEE International Solid-State Circuits Conference, p. 432, 1999
T. Yamauchi, F. Morisita, S. Maeda, K. Arimoto, K. Fujishima, H. Ozaki, T. Oshihara, IEEE Journal of Solid-State Circuits, Vol. 35, no. 8, p. 1169, 2000
F. Ichikawa, Y. Nagatomo, Y. Katakura, S. Itoh, H. Matsuhashi, N. Hirashita, S. Baba, Electrochemical Society Proceedings, Vol. 2003-05, p. 123, 2003
M. Itoh, Y. Kawai, S. Ito, K. Yokomizo, Y. Katakura, Y. Fukuda, F. Ichikawa, Electrochemical Society Proceedings, Vol. 2001-3, p. 331, 2003
B.Y. Hwang, M. Racanelli, M. Huang, J. Foerstner, S. Wilson, T. Wetteroth, S. Wald, J. Rugg, S. Cheng, Extended Abstracts of the International Conference on Solid-State Devices and Materials, Yokohama, p. 268, 1994
G.G. Shahidi, T.H. Ning, R. Dennard, B. Davari, Extended Abstracts of the International Conference on Solid-State Devices and Materials, Yokohama, p. 265, 1994
M. Guerra, A. Wittkower, J. Stahman, J. Schrankler, Semiconductor international, May 1990
M. Itoh, Y. Kawai, S. Ito, K. Yokomizo, Y. Katakura, Y. Fukuda, F. Ichikawa, Electrochemical Society Proceedings, Vol. 2001-3, p. 331, 2001
Y. Fukuda, S. Ito, M. Ito, OKI Technical Review, Vol. 4, p. 54, 2001
M.M. Pelella, W. Maszara, S. Sundararajan, S. Sinha, A. Wei, D. Ju, W. En, S. Krishnan, D. Chan, S. Chan, P. Yeh, M. Lee, D. Wu, M. Fuselier, R. van Bentum, G. Burbach, C. Lee, G. Hill, D. Greenlaw, C. Riccobene, O. Karlsson, D. Wristers, N. Kepler, Proceedings of the IEEE International SOI Conference, p. 1, 2001
M.M. Pelella, J.G. Fossum, IEEE Transactions on Electron Devices, Vol. 49, no. 1, p. 96, 2002
G.G. Shahidi, IBM Journal of Research & Development, Vol. 46, no. 2-3, p. 121, 2002
M.A. Pelella, J.G. Fossum, IEEE Transactions on Electron Devices, Vol. 49, no. 1, pp. 96, 2001
D. Flandre, D. Vanhoenacker, International Semiconductor Conference (CAS′98) Proceedings, p. 115, 1998
A.O. Adan, T. Naka, S. Kaneko, D. Urabe, K. Higashi, A. Kagisawa, IEEE International SOI Conference Proceedings, p. 116, 1996
T. Douseki, J. Yamada, H. Kyuragi, Symposium on VLSI Circuits Digest of Technical Papers, p. 6, 2002
D. Flandre, J.P. Colinge, J. Chen, D. De Ceuster, J.P. Eggermont, L. Ferreira, B. Gentinne, P.G.A. Jespers, A. Viviani, R. Gillon, J.P. Raskin, A. Vander Vorst, D. Vanhoenacker-Janvier, F. Silveira, Analog Integrated Circuits & Signal Processing, Vol. 21, no. 3, p. 213, 1999
T. Douseki, S. Shigematsu, Y. Tanabe, M. Harada, H. Inokawa, T. Tsuchiya, Digest of Technical Papers of the IEEE International Solid-State Circuits Conference, p. 84, 1996
M. Ino, H. Sawada, K. Nishimura, M. Urano, H. Suto, S. Date, T. Ishiara, T. Takeda, Y. Kado, H. Inokawa, T. Tsuchiya, Y. Sakakibara, Y. Arita, K. Izumi, K. Takeya, T. Sakai Digest of Technical Papers, IEEE International Solid-State Circuits Conference, p. 86, 1996
T. Fuse, Y. Oowaki, M. Terauchi, S. Watanabe, M. Yoshimi, K. Ohuchi, J. Matsunaga, Digest of Technical Papers, IEEE International Solid-State Circuits Conference, p. 88, 1996
A.O. Adan, T. Naka, S. Kaneko, D. Urabe, K. Higashi, A. Kasigawa, Proceedings of the IEEE International SOI Conference, p. 116, 1996
T. Fuse, Y. Oowaki, Y. Yamada, M. Kamoshida, M. Ohta, T. Shino, S. Kawanaka, M. Terauchi, T. Yoshida, G. Matsubara, S. Oshioka, S. Watanabe, M. Yoshimi, K. Ohuchi, S. Manabe, Digest of Technical papers of the International Solid-State Circuits Conference, p. 286, 1997
Y. Ohtomo, S. Yasuda, M. Nogawa, J. Inoue, K. Yamakoshi, H. Sawada, M. Ino, S. Hino, Y. Sato, Y. Takei, T. Watanabe, K. Takeya, Digest of Technical papers of the International Solid-State Circuits Conference, p. 154, 1997
T. Douseki, H. Kyuragi, Proceedings of the IEEE International SOI Conference, p. 5, 2003
H. Shang, M.H. White, D.A. Adams, Proceedings of the IEEE International SOI Conference, p. 37, 2002
M. Terauchi, Proceedings of the IEEE International SOI Conference, p. 108, 2000
P. Villard, J. Jomaah, B. Gomez, J. de Pontcharra, D. Save, S. Chouteau, E. Mackowiak, Electrochemical Society Proceedings, Vol. 2003-05, p. 243, 2003
M. Itoh, Y. Kawai, S. Ito, K. Yokomizo, Y. Katakura, Y. Fukuda, F. Ishikawa, Electrochemical Society Proceedings, Vol. 2001-3, p. 331, 2001
Y. Kado, Y. Matsuya, T. Douseki, S. Nakata, M. Harada, J. Yamada, Electrochemical Society Proceedings, Vol. 2001-3, p. 277, 200
D. Levacq, V. Dessard, D. Flandre, Electrochemical Society Proceedings, Vol. 2003-05, p. 249, 2003
D. Levacq, C. Liber, V. Dessard, D. Flandre, Proceedings of the IEEE International SOI Conference, p. 19, 2003
S. Natarajan, A. Marshall, IEEE International Conference on Electronics, Circuits and Systems, Part Vol. 2, p. 835, 2002
T. Eimori, T. Oashi, F. Morishita, T. Iwamatsu, Y. Yamaguchi, F. Okuda, K. Shimomura, H. Shimano, N. Sakashita, K. Arimoto, Y. inoue, S. Komori, M. Inuishi, T. Nishimura, H. Miyoshi, IEEE transactions on Electron Devices, Vol. 45, no. 5, p. 1000, 1998
T. Ikeda, S. Wakahara, Y. Tamaki, H. Higuchi, Proceedings of the IEEE International SOI Conference, p. 159, 1998
Y. Wada, K. Nii, H. Kuriyama, S. Maeda, K. Ueda, Y. Matsuda, Proceedings of the IEEE International SOI Conference, p. 127, 1998
Y. Hu, C. Teng, T.W. Houston, K. Joyner, T.J. Aton, Digest of Technical papers, Symposium on VLSI Technology, p. 128, 1996
K. Izumi, Y. Omura, M. Ishikawa, E. Sano, Technical Digest of the Symposium on VLSI Technology, p. 10, 1982
W.A. Krull, J.C. Lee, Proc. IEEE SOS/SOI Technology Workshop, p. 69, 1988
T. W. Houston, H. Lu, P. Mei, T.G.W. Blake, L.R. Hite, R. Sundaresan, M. Matloubian, W.E. Bailey, J. Liu, A. Peterson, G. Pollack, Proc. IEEE SOS/SOI Technology Workshop, p. 137, 1989
A.J. Auberton-Hervé, B. Giffard, M. Bruel, Proceedings of the IEEE SOS/SOI Technology Workshop, p. 169, 1989
W.E. Bayley, H. Lu, T.G.W. Blake, L.R. Hite, P. Mei, D. Hurta, T.W. Houston, G.P. Pollack, Proceedings of the IEEE International SOI Conference, p. 134, 1991
L.K. Wang, J. Seliskar, T. Bucelot, A. Edenfeld, N. Haddad, Technical Digest of the International Electron Device Meeting, p. 679, 1991
H. Lu, E. Yee, L. Hite, T. Houston, Y.D. Sheu, R. Rajgopal, C.C. CHen, J.M. Hwang, G. Pollack, Proceedings of IEEE International SOI Conference, p. 182, 1993
G.G. Shahidi, T.H. Ning, T.I. Chappell, J.H. Comfort, B.A. Chappell, R. Franch, C.J. Anderson, P.W. Cook, S.E. Schuster, M.G. Rosenfield, M.R. Polcari, R.H. Dennard, and B. Davari, Technical Digest of the International Electron Device Meeting, p. 813, 1993
T. Eimori, T. Oashi, H. Kimura, Y. Yamaguchi, T. Iwamatsu, T. Tsuruda, K. Suma, H. Hidaka, Y. Inoue, T. Nishimura, S. Satoh, and M. Miyoshi, Technical Digest of the International Electron Device Meeting, p. 45, 1993
F.T. Brady, T. Scott, R. Brown, J. Damato, N.F. Haddad, IEEE Transactions on Nuclear Science, Vol. 41, no. 6, p. 2304, 1994
H.-S. Kim, S.-B. Lee, D.-U. Choi, J.-H. Shim, K.-C. Lee, K.-P. Lee, K.-N. Kim, and J.-W. Park, Digest of Technical Papers of the Symposium on VLSI Technology, p. 143, 1995
T. Oashi, T. Eimori, F. Morishita, T. Iwamatsu, Y. Yamaguchi, F. Okuda, K. Shimomura, H. Shimano, S. Sakashita, K. Arimoto, Y. Inoue, S. Komori, M. Inuishi, T. Nishimura, and H. Miyoshi, Technical Digest of the International Electron Device Meeting, p. 609, 1996
K. Shimomura, H. Shimano, N. Sakashita, F. Okuda, T. Oashi, Y. Yamaguchi, T. Eimori, M. Inuishi, K. Arimoto, S. Maegawa, Y. Inoue, S. Komori, K. Kyuma, IEEE Journal of Solid-State Circuits, Vol. 32, no. 11, p. 1712, 1997
Y.H. Koh, M.R. Oh, J.W. Lee, J.W. Yang, W.C. Lee, C.K. Park, J.B. Park, Y.C. Heo, K.M. Rho, B.C. Lee, M.J. Chung, M. Huh, H.S. Kim, K.S. Choi, W.C. Lee, J.K. Lee, K.H. Ahn, K.W. Park, J.Y. Yang, H.K. Kim, D.H. Lee, I.S. Hwang, Technical Digest of International Electron Devices Meeting, p. 579, 1997
F.T. brady, R. Brown, L. Rockett, J. Vasquez, IEEE Transactions on Nuclear Science, Vol. 45, no. 6, p. 2436, 1998
J.W. Park, Y.G. Kim, I.K. Kim, K.C. Park, K.C. Lee, T.S. Jung, IEEE Journal of Solid-State Circuits, Vol. 34, p. 1446, 1999
Y.W. Kim, S.B. Park, Y.G. Ko, K.I. Kim, I.K. Kim, K.J. Bae, K.W. Lee, J.O. Y, U. Chung, K.P. Suh, Digest of Technical Papers of the IEEE International Solid-State Circuits Conference, p. 32, 1999
T. Yamauchi, F. Morisita, S. Maeda, K. Arimoto, K. Fujishima, H. Ozaki, T. Yoshihara, IEEE Journal of Solid-State Circuits, Vol. 35, no. 8, p. 1169, 2000
T. Douseki, N. Shibata, J. Yamada, Proceedings of the IEEE International SOI Conference, p. 24, 2000
D. Goldman, K. DeGregorio, C.S. Kim, M. Nielson, J. Zahurak, S. Parke, 2001 IEEE International SOI Conference. Proceedings, p. 97, 2001
M. Itoh, Y. Kawai, S. Ito, K. Yokomizo, Y. Katakura, Y. Fukuda, F. Ishikawa, Electrochemical Society Proceedings, Vol. 2001-3, p. 331, 2001
T. Douseki, N. Shibata, J. Yamada, Proceedings of the IEEE International SOI Conference, p. 143, 2001
A. Chatterjee, J. Liu, S. Aur, P.K. Mozumder, M. Rodder, I.C. Chen, Technical Digest of the International Electron Device Meeting, p. 87, 1994
Y. Hu, C. Teng, T.W. Houston, K. Joyner, and T.J. Aton, Digest of Technical papers, Symposium on VLSI Technology, p. 128, 1996
A. Zaleski, D.E. Ioannou, D. Flandre, J.P. Colinge, Proceedings of the IEEE International SOI Conference, p. 13, 1994
M.H. Chi, A. Bergemont, Proceedings of the IEEE International SOI Conference, p. 129, 1995
H. Choi, T. Tanabe, N. Kotaki, K.W. Koh, K.T. Park, H. Kurino, M. Koyanagi, Exgtended Abstracts of the International Conference on Solid-State Devices and Materials, p. 246, 2001
X. Lin, M. Chan, Proceedings of the IEEE International SOI Conference, p. 71, 2002
Y.K. Lee, J.S. Sim, S.K. Sung, C.J. Lee, T.H. Kim, J.D. Lee, B.G. Park, D.H. Lee, Y.W. Kim, IEEE Electron Device Letters, Vol. 23, no. 11, p. 664, 2002
H. Silva, M.K. Kim, C.W. Kim, S. Tiwari, Proceedings of the IEEE International SOI Conference, p. 105, 2003
J.A. Mandelman, R.H. Dennard, G.B. Bronner, J.K. DeBrosse, R. Divakaruni, Y. Li, C.J. Radens, IBM Journal of Research & Development, Vol. 46, no. 2-3, p. 187, 2002
M.R. Tack, M. Gao, CL. Claeys, G.J. Declerck, IEEE Transactions on Electron Devices, Vol. 37, no. 5, p. 1373, 1990
S. Okhonin, M. Nagoga, J.M. Saliese, P. Fazan, IEEE International SOI Conference, p. 153, 2001
S. Okhonin, M. Nagoga, J.M. Saliese, P. Fazan, IEEE Electron Device Letters, Vol. 23, no. 2, p. 85, 2002
S. Okhonin, M. Nagoga, J.M. Saliese, P. Fazan, O. Faynot, J. de Pontcharra, S. Cristoloveanu, H. van Meer, K. De Meyer, Solid-State Electronics, Vol. 46, no. 11, p. 1709, 2002
P. Fazan, S. Okhonin, M. Nagoga, J.M. Sál ese, L. Portmann, R. Ferrant, M. Pastre, M. Blagojevic, A. Borschberg, M. Declercq, Proceedings of the IEEE International SOI Conference, p. 10, 2002
T. Ohsawa, K. Fujita, T. Higashi, Y. Iwata, T. Kajiyama, Y. Asao, K. Sunouchi, IEEE Journal of Solid-State Circuits, Vol. 37, no. 11, p. 1510, 2002
P. Fazan, S. Okhonin, M. Nagoga, Proceedings of the IEEE International SOI Conference, p. 15, 2003
F. Silveira, D. Flandre, and P.G.A. Jespers, IEEE Journal of Solid-State Circuits, Vol. 31, no. 9, p. 1314, 1996
D. Flandre, B. Gentinne, J.P. Eggermont, and P.G.A. Jespers, Proceedings of the IEEE International SOI Conference, p. 99, 1994
Y. Omura and K. Izumi, IEEE Electron Device Letters, Vol. EDL-12, p. 655, 1991
E.A. McShane, K. Shenai, Proceedings of the 22nd International Conference on Microelectronics (MIEL), Vol. 1, p. 107, 2000
I. Rahim, I. Lim, J. Foerstner, and B.Y. Hwang, Proceedings of the IEEE International SOI Conference, p. 170, 1992
K. Joardar, Solid-State Electronics, Vol. 39, no. 4, p. 511, 1996
I. Rahim, B.Y. Hwang, and J. Foerstner, Proceedings of the IEEE International SOI Conference, p. 170, 1992
A. Viviani, J.P. Raskin, D. Flandre, J.P. Colinge, and D. Vanoenacker, Technical Digest of the International Electron Device Meeting, p. 713, 1995
J.P. Raskin, A. Viviani, D. Flandre, J.P. Colinge, IEEE Transactions on Electron Devices, Vol. 44, no. 12, p. 2252, 1997
D. Flandre, J.P. Colinge, J. Chen, D. De Ceuster, J.P. Eggermont, L. Ferreira, B. Gentinne, P.G.A. Jespers, A. Viviani, R. Gillon, J.P. Raskin, A. Vander Vorst, D. Vanhoenacker-Janvier, Analog Integrated Circuits and Signal Processing, Vol. 21, p. 213, 1999
D. Lederer, C. Desrumeaux, F. Brünier, J.P. Raskin, Proceedings of the IEEE International SOI Conference, p. 50, 2003
D. Eggert, P. Huebler, A. Huerrich, H. Kueck, W. Budde, M. Vorwerk, IEEE Transactions on Electron Devices, Vol. 44, no. 11, p. 1981, 1997
F. Ishikawa, Y. Nagatomo, Y. Katakura, S. Itoh, H. Matsuhashi, N. Hirashita, S. Baba, Electrochemical Society Proceedings, Vol. 2003-05, p. 123, 2003
J.O. Plouchart, Proceedings of the IEEE International SOI Conference, p. 1, 2003
ibidem
M. Vorwerk, D. Eggert, IEEE International Conference on Electronics, Circuits and Systems, Part Vol. 2, p. 31, 1998
D. Eggert, P. Huebler, A. Huerrich, H. Kueck, W. Budde, M. Vorwerk, IEEE Transactions on Electron Devices, Vol. 44, no. 11, p. 1981, 1997
Y. Fukuda, S. Ito, M. Ito, OKI Technical Review, Vol. 4, p. 54, 2001
F. Ichikawa, Y. Nagatomo, Y. Katakura, S. Itoh, H. Matsuhashi, N. Hirashita, S. Baba, Electrochemical Society Proceedings, Vol. 2003-05, p. 123, 2003
R. Reedy, J. Cable, D. Kelly, M. Stuber, F. Wright, G. Wu, Analog Integrated Circuits and Signal Processing, Vol. 25, p. 171, 2000
P. Francis, A. Terao, B. Gentinne, D. Flandre, J.P. Colinge, Technical Digest of the International Electron Device Meeting, p. 353, 1992
A.J. Auberton-Hervé, J.P. Colinge and D. Flandre, Japanese Solid State Technology, pp. 12–17, Dec. 1993(日本器亅二)
P. Francis, A. Terao, B. Gentinne, D. Flandre, and J.P. Colinge, Technical Digest of the International Electron Device Meeting, p. 353, 1992
A. Viviani, D. Flandre, and P. Jespers, Proceedings of the IEEE SOI Conference, p. 110, 1996
M. Hattori, S. Kuromiya, F. Itoh, IEEE International SOI Conference, p. 120, 1998
M. Hattori, S. Kuromiya, F. Itoh, Proceedings of the IEEE International SOI Conference, p. 119, 1998
J. Weyers and H. Vogt, Technical Digest of the International Electron Device Meeting, p. 225, 1992
A. Nakagawa, N. Yasuhara, I. Omura, Y. Yamaguchi, T. Ogura, T. Matsudai, Technical Digest of the International Electron Device Meeting, p. 229, 1992
D.B. King, “A summary of high-temperature electronics needs, research and development in the United States”, presented at the EUROFORM seminar, May 1992, Darmstadt, Germany
B. Gentinne, J.P. Eggermont, J.P. Colinge, Electronics Letters, Vol. 31-24, p. 2092, 1995
D.M. Fletwood, F.V. Thome, S.S. Tsao, P.V. Dressendorfer, V.J. Dandini, and J.R. Schwank, IEEE Transactions on Nuclear Science, Vol. 35, p. 1099, 1988
G.E.Davis, L.R. Hite, T.G.W. Blake, C.E. Chen, H.W. Lam, R. DeMoyer, IEEE Transactions on Nuclear Science, Vol. 32, p. 4432, 1985
W.F. Kraus, J.C. Lee, Proceedings SOS/SOI Technology Conference, p. 173, 1989
F. Irom, G.M. Swift, F.H. Farmanesh, A.H. Johnston, Proceedings of the IEEE International SOI Conference, p. 203, 2002
F.T. Brady, T. Scott T, R. Brown, J. Damato, N.F. Haddad, IEEE Transactions on Nuclear Science, Vol. 41, no. 6, pt. 1, p. 2304, 1994
F.T. Brady, R. Brown, L. Rockett, J. Vasquez, IEEE Transactions on Nuclear Science, Vol. 45, no. 6, pt. 1, p. 2436, 1998
J.L. Leray, E. Dupont-Nivet, M Raffaelli, Y.M. Coíc, O. Musseau, J.F. Péré, P. Lalande, J. Brédy, A.J. Auberton-Hervé, M. Bruel, and B. Giffard, Annales de Physique, Colloque n°2, Vol. 14, suppl. to n°6, p. 565, 1989
J.L. Leray, E. Dupont-Nivet, J.F. Péré, Y.M. Coíc, M. Rafaelli, A.J. Auberton-Hervé, M. Bruel, B. Giffard and J. Margail, IEEE Transactions on Nuclear Science, Vol. 37, no. 6, p. 2013, 1990
G.T. Goeloe, G.A. Hanidu, and K.H. Lee, Tech. Prog. of IEEE Nuclear and Space Radiation Effects Conference (NSREC), paper PG-5, p. 35, 1990
M.A. Guerra, Proc. of the 4th International Symposium on Silicon-on-Insulator Technology and Devices, Ed. by D. Schmidt, the Electrochemical Society, Vol. 90-6, p. 21, 1990
W.F. Kraus, J.C. Lee, W.H. Newman, and J.E. Clark, Tech. Prog. of IEEE Nuclear and Space Radiation Effects Conference (NSREC), paper PG-6, p. 35, 1990
L.J. Palkuti, J.J. LePage, IEEE Transactions on Nuclear Science, Vol. 29, p. 1832, 1982
J.L. Leray, E. Dupont-Nivet, J.F. Péré, Y.M. Coíc, M. Rafaelli, A.J. Auberton-Hervé, M. Bruel, B. Giffard and J. Margail, IEEE Transactions on Nuclear Science, Vol. 37, no. 6, p. 2013, 1990
J.L. Leray, E. Dupont-Nivet, J.F. Péré, O. Musseau, P. Lalande, and A. Umbert, Proceedings SOS/SOI Technology Conference, p. 114, 1989
M. Dentan, E. Delagnes, N. Fourches, M. Rouger, M.C. Habrard, L. Blanquart, P. Delpierre, R. Potheau, R. Truche, J.P. Blanc, E. Delevoye, J. Gautier, J.L. Pelloie, J. de Pontcharra, O. Flament, J.L. Leray, J.L. Martin, J. Montaron, and O. Musseau, IEEE Transactions on Nuclear Science, Vol. 40, no. 6, p. 1555, 1993
O. Flament, J.L. Leray, and O. Musseau, Low-power HF microelectronics: a unified approach, edited by G.A.S. Machado, IEE circuits and systems series 8, the Institution of Electrical Engineers, p. 185, 1996
R.P. Zingg, Microelectronic Engineering, Vol. 59, p. 461, 2001
R.P. Zingg, Proceedings of the International Symposium on Power Semiconductor Devices and ICs (ISPSD ′2001), p. 343, 2001
T. Letavic, M. Simpson, E. Arnold, E. Peters, R. Aquino, J. Curcio, S. Herko, S. Mukherjee, Proceedings of the International Symposium on Power Semiconductor Devices and ICs (ISPSD ′99), p. 325, 1999
R.P. Zingg, Microelectronic Engineering, Vol. 59, p. 461, 2001
M. Berkhout, IEEE. IEEE Journal of Solid-State Circuits, Vol. 38, no. 7, p. 1198, 2003
E. Arnold, H. Pein, and S.P. Herko, Technical Digest of the International Electron Device Meeting, p. 813, 1884
J. Weyers, H. Vogt, M. Berger, W. Mach, B. Mütterlein, M. Raab, F. Richter, and F. Vogt, Proceedings of the 22nd ESSDERC, Microelectronic Engineering, Vol. 19, p 733, 1992
T. Nishimura, Y. Akasaka, Extended Abstracts of the 5th International Workshop on Future Electron Devices — Three Dimensional Integration, Miyagi-Zao, Japan, p. 1, 1988
T. Nishimura, Y. Inoue, K. Sugahara, S. Kusunoki, T. Kumamoto, S. Nagawa, N. Nakaya, Y. Horiba, Y. Akasaka, Technical Digest of the International Electron Device Meeting, p. 111, 1987
A. Terao, F. Van de Wiele, IEEE Circuits and Devices Magazine, Vol. 3, no. 6, p. 31, 1987
R. Aibara, Y. Mitsui, T. Ae, Extended Abstracts of the 8th International Workshop on Future Electron Devices — Three Dimensional ICs and Nanometer Functional Devices, Kochi, Japan, p. 113, 1990
T. Ae, Extended Abstracts of the 5th International Workshop on Future Electron Devices — Three Dimensional Integration, Miyagi-Zao, Japan, p. 55, 1988
Y. Inoue, T. Ipposhi, T. Wada, K. Ichinose, T. Nishimura, Y. Akasaka, Proceedings of the Symposium on VLSI Technology, p. 39, 1989
C.C. Liu, S. Tiwari, Proceedings of the IEEE International SOI Conference, p. 68, 2002
Y. Akasaka, Extended Abstracts of the 8th International Workshop on Future Electron Devices — Three Dimensional ICs and Nanometer Functional Devices, Kochi, Japan, p. 9, 1990
M. Nakano, Oyo Buturi, Vol. 54, no. 7, p. 652, 1985 (日本器亅二)
T. Nishimura, Y. Akasaka, Vol. 54, no. 12, p. 1274, 1985 (日本器亅二)
K. Yamazaki, Y. Itoh, A. Wada, Y. Tomita, Extended Abstracts of the 8th International Workshop on Future Electron Devices — Three Dimensional ICs and Nanometer Functional Devices, Kochi, Japan, p. 105, 1990
Y. Itoh, A. Wada, K. Morimoto, Y. Tomita, K. Yamazaki K, Microelectronic Engineering, Vol. 15, no. 1-4, p. 187, 1991
K. Kioi, S. Toyayama, M. Koba, Technical Digest of the International Electron Devices Meeting, p. 66, 1988
S. Toyoyama, K. Kioi, K. Shirakawa, T. Shinozaki, K. Ohtake, Extended Abstracts of the 8th International Workshop on Future Electron Devices — Three Dimensional ICs and Nanometer Functional Devices, Kochi, Japan, p. 109, 1990
K. Kioi, T. Shinozaki, S. Toyoyama, K. Shirakawa, K. Ohtake, S. Tsuchimoto, IEEE Journal of Solid-State Circuits, Vol. 27, no. 8, p. 1130, 1992
G.W. Neudeck, Electrochemical Society Proceedings, Vol. 99-3, p. 25, 1999
J. Burns, L. Mcllrath, J. Hopwood, C. Keast, D.P. Vu, K. Warner, P. Wyatt, Proceedings of the IEEE Onternational SOI Conference, p. 20, 2000
K. Warner, J. Burns, C. Keast, R. Kunz, D. Lennon, A. Loomis, W. Mowers, D. Yost, Proceedings of the IEEE Onternational SOI Conference, p. 123, 2002
C. Colinge, B. Roberds, B. Doyle, Journal of Electronic Materials, Vol. 30, p. 841, 2001
H. Moriceau, O. Rayssac, B. Aspar, B. Ghyselen, Electrochemical Society Proceedings, Vol. 2003-19, p. 49, 2003
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2004 Springer Science+Business Media New York
About this chapter
Cite this chapter
Colinge, JP. (2004). SOI Circuits. In: Silicon-on-Insulator Technology: Materials to VLSI. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-9106-5_8
Download citation
DOI: https://doi.org/10.1007/978-1-4419-9106-5_8
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-4795-8
Online ISBN: 978-1-4419-9106-5
eBook Packages: Springer Book Archive