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Nanoscale Investigation of MOCVD- Pb(Zr,Ti)O3 Thin Films Using Scanning Probe Microscopy

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Nanoscale Phenomena in Ferroelectric Thin Films

Part of the book series: Multifunctional Thin Film Series ((MUTF))

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Abstract

Applications of SPM (scanning probe microscopy) techniques for nanoscale investigation of ferroelectric Pb(Zr,Ti)O3 (PZT) thin films are described. Topics are (1) local current flow in polycrystalline Pb(Zr,Ti)O3 (PZT) thin films, (2) ferroelectric properties of nanosized PZT islands and (3) polarization switching processes in epitaxial PZT thin films and capacitors. They are investigated using atomic force microscopy (AFM), transmission electron microscopy (TEM), conductive AFM and piezoresponse scanning force microscopy (PFM).

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Authors and Affiliations

  1. Himeji Institute of Technology, Japan

    Hironori Fujisawa & Masaru Shimizu

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  1. Hironori Fujisawa
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  2. Masaru Shimizu
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  1. Samsung Advanced Institute of Technology, Korea

    Seungbum Hong

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Fujisawa, H., Shimizu, M. (2004). Nanoscale Investigation of MOCVD- Pb(Zr,Ti)O3 Thin Films Using Scanning Probe Microscopy. In: Hong, S. (eds) Nanoscale Phenomena in Ferroelectric Thin Films. Multifunctional Thin Film Series. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-9044-0_9

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  • DOI: https://doi.org/10.1007/978-1-4419-9044-0_9

  • Publisher Name: Springer, Boston, MA

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