Nanoscale Imaging of Mechanical Properties by Ultrasonic Force Microscopy (UFM)
Acoustic microscopy1 enables the elastic properties of materials to be imaged and measured with submicron spatial resolution limited only by the wavelength of the ultrasound. Nevertheless, there are practical reasons why this resolution cannot be increased indefinitely. Therefore, in order to improve the spatial resolution below the wavelengths presently available, a near field technique is needed. Atomic force microscopy (AFM) offers the resolution required2, but by itself AFM does not measure material properties; in its usual mode it gives an image of the topography of a surface at constant normal force.
KeywordsAtomic Force Microscopy Subsurface Damage Acoustic Microscopy Cantilever Deflection Atomic Force Microscopy System
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