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Abstract

In this chapter I describe results of the experimental study of \(\hbox{Si}_3\hbox{N}_4/\hbox{SiO}_2\) interface. This work was carried out in an effort to examine the morphology of \(\hbox{Si}_3\hbox{N}_4\,(10\overline{1}0)\) surface in the absence of rare-earth elements to better understand their importance in stabilizing the ceramics open-ring termination discussed in Chap. 4. The chapter commences with an introduction to \(\hbox{Si}_3\hbox{N}_4/\hbox{SiO}_2\) interfaces, followed by a short summary of the experimental methods used in this study. Next, the results of the investigation are presented in detail, focusing in particular on the composition and bonding characteristics across the interface.

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References

  1. Liu, L., Xu, J.P., Chen, L.L., Lai, P.: A study on the improved programming characteristics of flash memory with \(\hbox{Si}_3\hbox{N}_4/\hbox{SiO}_2\) stacked tunneling dielectric. Microelectron. Reliab. 49, (2009)

    Google Scholar 

  2. Saraf, M., Akhvlediani, R., Edrei, R., Shima, R., Roizin, Y., Hoffman, A.: Low thermal budget \(\hbox{SiO}_2/\hbox{Si}_3\hbox{N}_4/\hbox{SiO}_2\) stacks for advanced SONOS memories. J. Appl. Phys. 102(054512), (2007)

    Google Scholar 

  3. Berberich, S., Godignon, P.E.M., Fonseca, L. J. M., Hartnagel, H.L.: Electrical characterisation of \(\hbox{Si}_3\hbox{N}_4/\hbox{SiO}_2\) double layers on p-type 6H-SiC. Microelectron. Reliab. 40, 833–836 (2000)

    Google Scholar 

  4. Wang, Y.Q., Hwang, W.S., Zhang, G., Yeo, Y.C.: Electrical characteristics of memory devices with a High-\(k\) \(\hbox{HfO}_{2}\) trapping layer and dual \(\hbox{SiO}_2/\hbox{Si}_3\hbox{N}_4\) tunneling layer. IEEE Trans. Electron Dev. 54(10), 2699–2705 (2007)

    Google Scholar 

  5. Santussi, S., Lozzi, L., Passacantando, M., Phani, A.R., Palumbo, E., Bracchitta, G., De Tommasis, R., Alfonsetti, R., Moccia, G.: Properties of stacked dielectric films composed of \(\hbox{SiO}_2/\hbox{Si}_3\hbox{N}_4/\hbox{SiO}_2\) tunneling layer. J. Non-Cryst. Solids 245, 224–231 (1999)

    Google Scholar 

  6. Kazmierczak, A., Dortu, F., Schrevens, O., Giannone, D., Vivien, L., Marris-Morini, D., Bouville, D., Cassan, E., Gylfason, K.B., Sohlstrom, H.S.B., Griol, A., Hill, D.: Light coupling and distribution for \(\hbox{Si}_3\hbox{N}_4/\hbox{SiO}_2\) integrated mutichannel single-mode sensing system. Opt. Eng. 48(1), (2009)

    Google Scholar 

  7. Winkelman, G.B., Dwyer, C., Marsh, C., Hudson, T.S., Nguyen-Manh, D., Döblinger, M., Cockayne, J.H.: The crystal/glass interface in doped \(\hbox{Si}_3\hbox{N}_4.\) Mater. Sci. Eng. A 422, (2006)

    Google Scholar 

  8. Egerton, R.F.: Applications of energy-loss spectroscopy. In: Electron Energy-Loss Spectroscopy in the Electron Microscopy, 2nd edn. pp. 59–72, Plenum Press, New York (1996)

    Google Scholar 

  9. Wang, P., D’Alfonso, A.J., Findlay, S.D., Allen, L.J., Bleloch, A.L.: Contrast reversal in atomic-resolution chemical mapping. Phys. Rev. Lett. 101(236102), (2008)

    Google Scholar 

  10. Kimoto, K., Ishizuka, K., Matsui, Y.: Decisive factors for realizing atomic-column resolution using STEM and EELS. Micron. 39, (2008)

    Google Scholar 

  11. Ziegler, A., Idrobo, J.C., Cinibulk, M.K., Kisielowski, C., Browning, N.D., Ritchie, R.O.: Interface structure and atomic bonding characteristics in silicon nitride ceramics. Science 306(1768), (2004)

    Google Scholar 

  12. Van Benthem, K., Painter, G.S., Averill, F.W., Pennycook, S., Becher, P.F.: Experimental probe of adsorbate binding energies at internal crystalline/amorphous interfaces in Gd-doped \(\hbox{Si}_3\hbox{N}_4.\) Appl. Phys. Lett. 92, (2008)

    Google Scholar 

  13. Mkhoyan, K.A., Silcox, J.: Electron-beam-induced damage in wurtzite InN. Appl. Phys. Lett. 82(6), (2002)

    Google Scholar 

  14. Levin, I., Leapman, R.D., Kovler M., Roizin, Y.: Radiation-induced nitrogen segregation during electron energy loss spectroscopy of silicon-oxide-nitride-oxide stacks. Appl. Phys. Lett. 83(8), (2003)

    Google Scholar 

  15. Batson, P.E.: Simultaneous STEM imaging and electron energy-loss spectroscopy with atomic-column sensitivity. Nature 366, 727–728 (1993)

    Google Scholar 

  16. Browning, N.D., Chisholm, M.F., Pennycook, S.J.: Atomic-resolution chemical analysis using a scanning transmission electron microscope. Nature 366, 143–146 (1993)

    Google Scholar 

  17. Brydson, R.: Electron energy-Loss spectroscopy and energy dispersive X-ray analysis. In: Kirkland, A.I., Hutchison, J.L. (eds.) Nanocharacterisation, pp. 94–136. The Royal Society of Chemistry, Cambridge (2007)

    Google Scholar 

  18. Gatan: Gatan Digital Micrograph. Gatan. Inc. http://www.gatan.com/software (2001)

  19. Benco, L.: Chemical bonding at grain boundaries: MgO on \(\beta\)-\(\hbox{Si}_3\hbox{N}_4.\) Surf. Sci. 327, 274–284 (1995)

    Google Scholar 

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Correspondence to Weronika Walkosz .

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Walkosz, W. (2011). Atomic-Resolution Study of β-Si3N4/SiO2 Interfaces. In: Atomic Scale Characterization and First-Principles Studies of Si₃N₄ Interfaces. Springer Theses. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-7817-2_6

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