Application to Semiconductors

  • James M. LeBeau
  • Dmitri O. Klenov
  • Susanne Stemmer


In this chapter, we discuss the application of scanning transmission electron microscopy in the field of semiconductor research, using specific examples from the literature.


Scanning Transmission Electron Microscopy Scanning Transmission Electron Microscopy Image HAADF Image Image Formation Process Gate Stack 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



Melody Agustin provided the image shown in Figure 12–1 of this chapter. We would like to also thank the following collaborators for providing samples: Joshua Zide, Jeramy Zimmerman, Art Gossard, Andrei Kolmakov, Martin Moscovitz, Hao Li, Darrell Schlom, Paul McIntyre, Dominique Bougeard, Jacob Hooker, Qi Hu, and Chris Palmstrøm. We thank the U.S. National Science Foundation (Grant No. DMR-0804631) and the Department of Energy for support (Grant No. DE-FG02-06ER45994). J.M.L. also thanks the U.S. Department of Education for support under the GAANN program (Grant No. P200A07044).


  1. M.P. Agustin, G. Bersuker, B. Foran, L.A. Boatner, S. Stemmer, J. Appl. Phys. 100, 024103 (2006)CrossRefGoogle Scholar
  2. M.P. Agustin, L.R.C. Fonseca, J.C. Hooker, S. Stemmer, Appl. Phys. Lett. 87, 3 (2005)CrossRefGoogle Scholar
  3. J.E. Allen, E.R. Hemesath, D.E. Perea, J.L. Lensch-Falk, Z.Y. Li, F. Yin, M.H. Gass, P. Wang, A.L. Bleloch, R.E. Palmer, L.J. Lauhon, Nat. Nano. 3, 168 (2008)CrossRefGoogle Scholar
  4. A.Y. Borisevich, A.R. Lupini, S.J. Pennycook, Proc. Nat. Acad. Sci. USA 103, 3044 (2006)CrossRefGoogle Scholar
  5. D. Bougeard, N. Sircar, S. Ahlers, V. Lang, G. Abstreiter, A. Trampert, J.M. LeBeau, S. Stemmer, D.W. Saxey, A. Cerezo, Nano Lett. 9, 3743 (2009)CrossRefGoogle Scholar
  6. B.W. Busch, O. Pluchery, Y.J. Chabal, D.A. Muller, R.L. Opila, J.R. Kwo, E. Garfunkel, MRS Bull. 27, 206 (2002)CrossRefGoogle Scholar
  7. R. Chau, Solid State Technol. 51, 30 (2008)Google Scholar
  8. R. Chau, S. Datta, M. Doczy, B. Doyle, J. Kavalieros, M. Metz, Electron Dev. Lett. 25, 408 (2004)CrossRefGoogle Scholar
  9. M.F. Chisholm, A. Maiti, S.J. Pennycook, S.T. Pantelides, Phys. Rev. Lett. 81, 132 (1998)CrossRefGoogle Scholar
  10. A.J. Craven, M. MacKenzie, D.W. McComb, F.T. Docherty, Microelectron. Eng. 80, 90 (2005)CrossRefGoogle Scholar
  11. A.C. Diebold, B. Foran, C. Kisielowski, D.A. Muller, S.J. Pennycook, E. Principe, S. Stemmer, Microsc. Microanal. 9, 493 (2003)CrossRefGoogle Scholar
  12. P. Ercius, M. Weyland, D.A. Muller, L.M. Gignac, Appl. Phys. Lett. 88, 243116 (2006)CrossRefGoogle Scholar
  13. U. Falke, A. Bleloch, M. Falke, S. Teichert, Phys. Rev. Lett. 92, 116103 (2004)CrossRefGoogle Scholar
  14. M. Falke, U. Falke, A. Bleloch, S. Teichert, G. Beddies, H.J. Hinneberg, Appl. Phys. Lett. 86, 203103 (2005)CrossRefGoogle Scholar
  15. B. Foran, J. Barnett, P.S. Lysaght, M.P. Agustin, S. Stemmer, J. Electron Spectrosc. Relat. Phenom. 143, 149 (2005)CrossRefGoogle Scholar
  16. C.J. Först, K. Schwarz, P.E. Blöchl, Phys. Rev. Lett. 95, 137602 (2005)CrossRefGoogle Scholar
  17. V. Grillo, Ultramicroscopy 109, 1453 (2009)CrossRefGoogle Scholar
  18. V. Grillo, E. Carlino, F. Glas, Phys. Rev. B 77, 054103 (2008)CrossRefGoogle Scholar
  19. M. Haider, H. Rose, S. Uhlemann, E. Schwan, B. Kabius, K. Urban, Ultramicroscopy 75, 53 (1998)CrossRefGoogle Scholar
  20. A.T. Hanbicki, B.T. Jonker, G. Itskos, G. Kioseoglou, A. Petrou, Appl. Phys. Lett. 80, 1240 (2002)CrossRefGoogle Scholar
  21. S. Hillyard, J. Silcox, Ultramicroscopy 58, 6 (1995)CrossRefGoogle Scholar
  22. T. Inoue, T. Kita, O. Wada, M. Konno, T. Yaguchi, T. Kamino, Appl. Phys. Lett. 92, 031902 (2008)CrossRefGoogle Scholar
  23. E.M. James, N.D. Browning, Ultramicroscopy 78, 125 (1999)CrossRefGoogle Scholar
  24. E.M. James, N.D. Browning, A.W. Nicholls, M. Kawasaki, Y. Xin, S. Stemmer, J. Electron Microsc. 47, 561 (1998)CrossRefGoogle Scholar
  25. W. Jian, Z. Kaiming, X. Xide, Solid State Commun. 86, 731 (1993)CrossRefGoogle Scholar
  26. A.V. Kadavanich, T.C. Kippeny, M.M. Erwin, S.J. Pennycook, S.J. Rosenthal, J. Phys. Chem. B 105, 361 (2000)CrossRefGoogle Scholar
  27. U. Kaiser, D.A. Muller, J.L. Grazul, A. Chuvilin, M. Kawasaki, Nat. Mater. 1, 102 (2002)CrossRefGoogle Scholar
  28. W. Kim, J. Zide, A. Gossard, D. Klenov, S. Stemmer, A. Shakouri, A. Majumdar, Phys. Rev. Lett. 96, 045901 (2006)CrossRefGoogle Scholar
  29. E.J. Kirkland, R.F. Loane, J. Silcox, Ultramicroscopy 23, 77 (1987)CrossRefGoogle Scholar
  30. D.O. Klenov, D.C. Driscoll, A.C. Gossard, S. Stemmer, Appl. Phys. Lett. 86, 111912 (2005)CrossRefGoogle Scholar
  31. D.O. Klenov, T.E. Mates, S. Stemmer, Appl. Phys. Lett. 89, 041918 (2006)CrossRefGoogle Scholar
  32. D.O. Klenov, D.G. Schlom, H. Li, S. Stemmer, Jap. J. Appl. Phys. 44, L617 (2005)CrossRefGoogle Scholar
  33. D.O. Klenov, J.M. Zide, J.D. Zimmerman, A.C. Gossard, S. Stemmer, Appl. Phys. Lett. 86, 241901 (2005)Google Scholar
  34. A. Kolmakov, D.O. Klenov, Y. Lilach, S. Stemmer, M. Moskovits, Nano Lett. 5, 667 (2005)CrossRefGoogle Scholar
  35. W.R.L. Lambrecht, A.G. Ptukhov, B.T. Hemmelman, Solid State Commun. 108, 361 (1998)CrossRefGoogle Scholar
  36. J.M. LeBeau, A.J. D’Alfonso, S.D. Findlay, S. Stemmer, L.J. Allen, Phys. Rev. B 80, 174106 (2009)CrossRefGoogle Scholar
  37. J.M. LeBeau, S.D. Findlay, L.J. Allen, S. Stemmer, Phys. Rev. Lett. 100, 206101 (2008)CrossRefGoogle Scholar
  38. J.M. LeBeau, S.D. Findlay, X. Wang, A.J. Jacobson, L.J. Allen, S. Stemmer, Phys. Rev. B 79, 214110 (2009)CrossRefGoogle Scholar
  39. J.M. LeBeau, Q.O. Hu, C.J. Palmstrom, S. Stemmer, Appl. Phys. Lett. 93, 121909 (2008)CrossRefGoogle Scholar
  40. J.M. LeBeau, S. Stemmer, Ultramicroscopy 108, 1653 (2008)CrossRefGoogle Scholar
  41. S. Lopatin, S.J. Pennycook, J. Narayan, G. Duscher, Appl. Phys. Lett. 81, 2728 (2002)CrossRefGoogle Scholar
  42. A.P. Li, C. Zeng, K. van Benthem, M.F. Chisholm, J. Shen, S.V.S.N. Rao, S.K. Dixit, L.C. Feldman, A.G. Petukhov, M. Foygel, H.H. Weitering, Phys. Rev. B 75, 201201 (2007)CrossRefGoogle Scholar
  43. A.J. McGibbon, S.J. Pennycook, J.E. Angelo, Science 269, 519 (1995)CrossRefGoogle Scholar
  44. P.A. Midgley, M. Weyland, T.J.V. Yates, I. Arslan, R.E. Sunin-Borkowski, J.M. Thomas, J. Microsc. 223, 185 (2006)CrossRefGoogle Scholar
  45. K.A. Mkhoyan, S.E. Maccagnano-Zacher, M.G. Thomas, J. Silcox, Phys. Rev. Lett. 100, 025503 (2008)CrossRefGoogle Scholar
  46. S.I. Molina, T. Ben, D.L. Sales, J. Pizarro, P.L. Galindo, M. Varela, S.J. Pennycook, D. Fuster, Y. Gonzalez, L. Gonzalez, Nanotechnology 17, 5652 (2006)CrossRefGoogle Scholar
  47. S.I. Molina, M. Varela, D.L. Sales, T. Ben, J. Pizarro, P.L. Galindo, D. Fuster, Y. Gonzalez, L. Gonzalez, S.J. Pennycook, Appl. Phys. Lett. 91, 143112 (2007)CrossRefGoogle Scholar
  48. D.G. Morgan, Q.M. Ramasse, N.D. Browning, J. Electron. Microsc. 58, 223 (2009)CrossRefGoogle Scholar
  49. D.A. Muller, T. Sorsch, S. Moccio, F.H. Baumann, K. Evans-Lutterodt, G. Timp, Nature 399, 758 (1999)CrossRefGoogle Scholar
  50. D.A. Muller, B. Edwards, E.J. Kirkland, J. Silcox, Ultramicroscopy 86, 371 (2001)CrossRefGoogle Scholar
  51. D.A. Muller, L.F. Kourkoutis, M. Murfitt, J.H. Song, H.Y. Hwang, J. Silcox, N. Dellby, O.L. Krivanek, Science 319, 1073 (2008)CrossRefGoogle Scholar
  52. P.D. Nellist, M.F. Chisholm, N. Dellby, O.L. Krivanek, M.F. Murfitt, Z.S. Szilagyi, A.R. Lupini, A. Borisevich, W.H. Sides Jr., S.J. Pennycook, Science 305, 1741 (2004)CrossRefGoogle Scholar
  53. P.D. Nellist, S.J. Pennycook, J. Microsc. 190, 159 (1998)CrossRefGoogle Scholar
  54. S.H. Oh, K.V. Benthem, S.I. Molina, A.Y. Borisevich, W. Luo, P. Werner, N.D. Zakharov, D. Kumar, S.T. Pantelides, S.J. Pennycook, Nano Lett. 8, 1016 (2008)CrossRefGoogle Scholar
  55. S.J. Pennycook, M.F. Chisholm, A.R. Lupini, M. Varela, A.Y. Borisevich, M.P. Oxley, W.D. Luo, K. van Benthem, S.-H. Oh, D.L. Sales, S.I. Molina, J. García-Barriocanal, C. Leon, J. Santamaría, S.N. Rashkeev, S.T. Pantelides, Philos. Trans. Royal Soc. A 367, 3709 (2009)CrossRefGoogle Scholar
  56. D.D. Perovic, C.J. Rossouw, A. Howie, Ultramicroscopy 52, 353 (1993)CrossRefGoogle Scholar
  57. J. Pizarro, P.L. Galindo, E. Guerrero, A. Yanez, M.P. Guerrero, A. Rosenauer, D.L. Sales, S.I. Molina, Appl. Phys. Lett. 93, 153107 (2008)CrossRefGoogle Scholar
  58. S.J. Rosenthal, J. McBride, S.J. Pennycook, L.C. Feldman, Surf. Sci. Rep. 62, 111 (2007)CrossRefGoogle Scholar
  59. B.D. Schultz, N. Marom, D. Naveh, X. Lou, C. Adelmann, J. Strand, P.A. Crowell, L. Kronik, C.J. Palmstrom, Phys. Rev. B 80, 201309 (2009)CrossRefGoogle Scholar
  60. J.C.H. Spence, High-Resolution Electron Microscopy (Oxford Science Publications, New York, 2003)Google Scholar
  61. S. Stemmer, J. Vac. Sci. Technol. B 22, 791 (2004)CrossRefGoogle Scholar
  62. S. Stemmer, Y.L. Li, B. Foran, P.S. Lysaght, S.K. Streiffer, P. Fuoss, S. Seifert, Appl. Phys. Lett. 83, 3141 (2003)CrossRefGoogle Scholar
  63. M.J. Tambe, S.K. Lim, M.J. Smith, L.F. Allard, S. Gradečak, Appl. Phys. Lett. 93, 151917 (2008)CrossRefGoogle Scholar
  64. A. Thust, W.M.J. Coene, M. Op de Beeck, D. Van Dyck, Ultramicroscopy 64, 211 (1996)CrossRefGoogle Scholar
  65. R.T. Tung, J. Vac. Sci. Technol. B 11 (1993)Google Scholar
  66. S. Van Aert, J. Verbeeck, R. Erni, S. Bals, M. Luysberg, D.V. Dyck, G.V. Tendeloo, Ultramicroscopy 109, 1236 (2009)CrossRefGoogle Scholar
  67. K. van Benthem, A.R. Lupini, M.P. Oxley, S.D. Findlay, L.J. Allen, S.J. Pennycook, Ultramicroscopy 106, 1062 (2006)CrossRefGoogle Scholar
  68. P.M. Voyles, D.A. Muller, J.L. Grazul, P.H. Citrin, H.-J.L. Gossmann, Nature 416, 826 (2002)CrossRefGoogle Scholar
  69. G.D. Wilk, D.A. Muller, Appl. Phys. Lett. 83, 3984 (2003)CrossRefGoogle Scholar
  70. Y. Xin, S.J. Pennycook, N.D. Browning, P.D. Nellist, S. Sivananthan, F. Omnes, B. Beaumont, J.P. Faurie, P. Gibart, Appl. Phys. Lett. 72, 2680 (1998)CrossRefGoogle Scholar
  71. Z. Yu, D.A. Muller, J. Silcox, J. Appl. Phys. 95, 3362 (2004)CrossRefGoogle Scholar
  72. Z. Yu, D.A. Muller, J. Silcox, Ultramicroscopy 108, 494 (2008)CrossRefGoogle Scholar
  73. T.J. Zega, A.T. Hanbicki, S.C. Erwin, I. Zutic, G. Kioseoglou, C.H. Li, B.T. Jonker, R.M. Stroud, Phys. Rev. Lett. 96, 196101 (2006)CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  • James M. LeBeau
    • 1
  • Dmitri O. Klenov
    • 2
  • Susanne Stemmer
    • 1
  1. 1.Materials DepartmentUniversity of CaliforniaSanta BarbaraUSA
  2. 2.FEI CompanyEindhovenThe Netherlands

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