Application to Semiconductors

  • James M. LeBeau
  • Dmitri O. Klenov
  • Susanne Stemmer
Chapter

Abstract

In this chapter, we discuss the application of scanning transmission electron microscopy in the field of semiconductor research, using specific examples from the literature.

Keywords

Scanning Transmission Electron Microscopy Scanning Transmission Electron Microscopy Image HAADF Image Image Formation Process Gate Stack 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgments

Melody Agustin provided the image shown in Figure 12–1 of this chapter. We would like to also thank the following collaborators for providing samples: Joshua Zide, Jeramy Zimmerman, Art Gossard, Andrei Kolmakov, Martin Moscovitz, Hao Li, Darrell Schlom, Paul McIntyre, Dominique Bougeard, Jacob Hooker, Qi Hu, and Chris Palmstrøm. We thank the U.S. National Science Foundation (Grant No. DMR-0804631) and the Department of Energy for support (Grant No. DE-FG02-06ER45994). J.M.L. also thanks the U.S. Department of Education for support under the GAANN program (Grant No. P200A07044).

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Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  • James M. LeBeau
    • 1
  • Dmitri O. Klenov
    • 2
  • Susanne Stemmer
    • 1
  1. 1.Materials DepartmentUniversity of CaliforniaSanta BarbaraUSA
  2. 2.FEI CompanyEindhovenThe Netherlands

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