Abstract
The concept of pressure was primarily based on the pioneering work of Evangelista Torricelli who for a short time was a student of Galileo [1]. During his experiments with mercury filled dishes, in 1643, he realized that the atmosphere exerts pressure on Earth. Another great experimenter Blaise Pascal, in 1647, conducted an experiment with the help of his brother-in-law, Perier, on the top of the mountain Puy de Dome and at its base. He observed that pressure exerted on the column of mercury depends on elevation. He named a mercury-in-vacuum instrument they used in the experiment the barometer. In 1660, Robert Boyle stated his famous relationship: “The product of the measures of pressure and volume is constant for a given mass of air at fixed temperature.” In 1738, Daniel Bernoulli developed an impact theory of gas pressure to the point where Boyle’s law could be deducted analytically. Bernoulli also anticipated the Charles–Gay-Lussac law by stating that pressure is increased by heating gas at a constant volume. For a detailed description of gas and fluid dynamics, a reader should be referred to one of the many books on the fundamentals of physics. Below, we briefly summarize the basics, which are essential for understanding design and use of pressure sensors.
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Notes
- 1.
Note that this sensor can be used as an inclination sensor when pressures at both sides of the tube are equal.
- 2.
Stress is measured in N/m2.
- 3.
Difficult but not impossible. Thin diaphragms were developed for the vacuum sensors [21], albeit they are expensive and very delicate.
- 4.
Refer to description of Pitot tubes elsewhere, for example in [16].
References
Benedict RP (1984) Fundamentals of temperature, pressure, and flow measurements, 3rd edn. Wiley, New York
Plandtl L (1952) Essentials of fluid dynamics. Hafner, New York
Neubert HKP (1975) Instrument transducers. An introduction to their performance and design, 2nd edn. Clarendon, Oxford
Clark SK, Wise KD (1979) Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensor. IEEE Trans Electron Devices ED-26:1887–1896
Tufte ON, Chapman PW, Long D (1962) Silicon diffused-element piezoresistive diaphragm. J Appl Phys 33:3322–3327
Kurtz AD, Gravel CL (1967) Semiconductor transducers using transverse and shear piezoresistance. In: Proc. 22nd ISA conf., No. P4-1 PHYMMID-67, Sept.
Tanigawa H, Ishihara T, Hirata M, Suzuki K (1985) MOS integrated silicon pressure sensor. IEEE Trans Electron Devices ED-32(7):1191–1195
Petersen K, Barth P, Poydock J, Brown J, Mallon J Jr, Bryzek J (1988) Silicon fusion bonding for pressure sensors. In: Rec. proc. IEEE solid-state sensor actuator workshop, pp 144–147
Proud R (1991) VRP transducers for low-pressure measurement. Sensors, Feb 1991, pp 20–22
Wolthuis RA, Mitchell GL, Saaski E, Hratl JC, Afromowitz MA (1991) Development of medical pressure and temperature sensors employing optical spectral modulation. IEEE Trans Biomed Eng 38(10):974–981
Hälg B (1991) A silicon pressure sensor with an interferometric optical readout. In: Transducers’91. International conference on solid-state sensors and actuators. Digest of Technical Papers, pp 682–684, IEEE, 1991
Vaughan JM (1989) The Fabry–Perot interferometers. Bristol, Adam Hilger
Saaski EW, Hartl JC, Mitchell GL (1989) A fiber optic sensing system based on spectral modulation. Paper #86-2803, ©ISA
Von Smoluchovski M (1911) Ann Physik 35:983
Fraden J (2009) Detector of low levels of gas pressure and flow. US Patent 7,490,512, 17 Feb
Kermode AC (2006) Mechanics of flight. In: Barnard RH, Philpott DR (eds) 11th edn. Prentice Hall, Harlow
Buckley OE (1916) Proc Natl Acad Sci USA 2:683
Leck JH (1957) Pressure measurement in vacuum systems. Chapman & Hall, London, pp 70–74
Bayard RT, Alpert D (1950) Rev Sci Instrum 21:571
Fremery JK (1946) Vacuum 32:685
Zhang Y et al (2001) An ultra-sensitive, high-vacuum absolute capacitive pressure sensor. In: 14th IEEE international conference on micro electro mechanical systems (Cat. No. 01CH37090), Technical Digest, pp 166–169.
Goehner R, Drubetsky E, Brady HM, Bayles WH Jr (2000) Vacuum measurement. In: Webster J (ed) Mechanical variables measurement. CRC Press LLC, Boca Raton, FL
Di Giovanni M (1982) Flat and corrugated diaphragm design handbook. Marcel Dekker, Inc., New York.
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Fraden, J. (2010). Pressure Sensors. In: Handbook of Modern Sensors. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-6466-3_10
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