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Elements of Lumped-Parameter Modeling in MEMS

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Book cover MEMS Linear and Nonlinear Statics and Dynamics

Part of the book series: Microsystems ((MICT,volume 20))

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Abstract

In this chapter, we discuss the various elements of lumped-parameter modeling in MEMS devices. These include the stiffness of microstructures, the inertia elements, and the damping mechanisms of energy dissipation in microstructures. The forces affecting microstructures due to actuation and detection are another element, which is the subject of Chap. 3. The discussion here is focused mainly on linear modeling; nonlinear modeling is introduced in the following chapter.

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  1. Department of Mechanical Engineering, State University of New York, Binghamton, NY, USA

    Mohammad I. Younis Ph.D.

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Correspondence to Mohammad I. Younis Ph.D. .

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Younis, M.I. (2011). Elements of Lumped-Parameter Modeling in MEMS. In: MEMS Linear and Nonlinear Statics and Dynamics. Microsystems, vol 20. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-6020-7_4

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  • DOI: https://doi.org/10.1007/978-1-4419-6020-7_4

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