Testing and Standards for Qualification

  • Allyson L. Hartzell
  • Mark G. da Silva
  • Herbert R. Shea
Part of the MEMS Reference Shelf book series (MEMSRS)


It can be said that the semiconductor is based on three elements: the transistor, the capacitor and the wire. There is not a standard set of structures in the MEMS world; this is a very versatile field with little boundaries and new products developing daily (bioMEMS from polymers, inertial MEMS, powerMEMS, optical MEMS, RF MEMS, etc.). Thus, testing each MEMS product type and design can require unique instruments that are often custom designed. Development of the product itself and test platforms that quantify the test distribution of MEMS parts is critical to produce the product. If the part test distributions all fall within the production specification then 100% yield is achieved, the ultimate goal for any manufacturing line (Chapter 7).


Test Platform Laser Doppler Vibrometer Mechanical Shock High Temperature Storage Deformable Mirror 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  • Allyson L. Hartzell
    • 1
  • Mark G. da Silva
    • 2
  • Herbert R. Shea
    • 3
  1. 1.Lilliputian Systems, Inc.WilmingtonUSA
  2. 2.RSTC, MS-112Analog Devices Inc.WilmingtonUSA
  3. 3.Microsystems for Space Technologies LaboratoryEPFLNeuchatelSwitzerland

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