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Lifetime Prediction

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MEMS Reliability

Part of the book series: MEMS Reference Shelf ((MEMSRS))

Abstract

Reliability continues to be one of the critical drivers for MEMS acceptance and growth. Emerging technologies require marketplace acceptance in order to be designed into high volume and critical applications. Thus, the field of reliability physics must be approached at the most fundamental level when evaluating and predicting micromachined product field performance over the lifetime of the product. The lifetime prediction portion of the reliability program is seen in Fig. 2.1.

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Author information

Authors and Affiliations

  1. Lilliputian Systems, Inc., 36 Jonspin Road, Wilmington, MA, 01887-1091, USA

    Allyson L. Hartzell

  2. RSTC, MS-112, Analog Devices Inc., 804 Woburn Street, Wilmington, MA, 01887, USA

    Mark G. da Silva

  3. Microsystems for Space Technologies Laboratory, EPFL, Rue Jaquet-Droz 1, CH-2002, Neuchatel, Switzerland

    Herbert R. Shea

Authors
  1. Allyson L. Hartzell
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  2. Mark G. da Silva
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  3. Herbert R. Shea
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Corresponding author

Correspondence to Allyson L. Hartzell .

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© 2011 Springer Science+Business Media, LLC

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Hartzell, A.L., da Silva, M.G., Shea, H.R. (2011). Lifetime Prediction. In: MEMS Reliability. MEMS Reference Shelf. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-6018-4_2

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  • DOI: https://doi.org/10.1007/978-1-4419-6018-4_2

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  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4419-6017-7

  • Online ISBN: 978-1-4419-6018-4

  • eBook Packages: EngineeringEngineering (R0)

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