Abstract
The development of Micro-Electro Mechanical Systems (MEMS) and introduction of MEMS enabled products in the market have made amazing strides in the last two decades; fulfilling a vision of “cheap complex devices of great reliability”. MEMS are integrated micro-scale systems combining electrical, mechanical or other (magnetic, fluidic/thermal/etc.) elements typically fabricated using conventional semiconductor batch processing techniques that range in size from several nanometers to microns or even millimeters [1]. These systems are designed to interact with the external environment either in a sensing or actuation mode to generate state information or control it at a different scale.
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- 1.
“The world has arrived at an age of cheap complex devices of great reliability, and something is bound to come of it” – Dr. V. Bush (1945) [2].
- 2.
Databeans estimate.
References
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© 2011 Springer Science+Business Media, LLC
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Hartzell, A.L., da Silva, M.G., Shea, H.R. (2011). Introduction: Reliability of MEMS. In: MEMS Reliability. MEMS Reference Shelf. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-6018-4_1
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DOI: https://doi.org/10.1007/978-1-4419-6018-4_1
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