Advertisement

Introduction: Reliability of MEMS

  • Allyson L. Hartzell
  • Mark G. da Silva
  • Herbert R. Shea
Chapter
Part of the MEMS Reference Shelf book series (MEMSRS)

Abstract

The development of Micro-Electro Mechanical Systems (MEMS) and introduction of MEMS enabled products in the market have made amazing strides in the last two decades; fulfilling a vision of “cheap complex devices of great reliability”. MEMS are integrated micro-scale systems combining electrical, mechanical or other (magnetic, fluidic/thermal/etc.) elements typically fabricated using conventional semiconductor batch processing techniques that range in size from several nanometers to microns or even millimeters [1]. These systems are designed to interact with the external environment either in a sensing or actuation mode to generate state information or control it at a different scale.

Keywords

Failure Mode Actuation Mode Potential Failure Mode Reliability Challenge Product Development Effort 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

  1. 1.
    Senturia, S.D. (2001) Microsystem Design. Dordrecht: Kluwer.Google Scholar
  2. 2.
    Bush, V. (July 1945) As We May Think, Atlantic Magazine (http://www.theatlantic.com/magazine/archive/1969/12/as-we-may-think/3881/)
  3. 3.
    Bralla, J.G. (1998) Design For Excellence. London, UK: McGraw-Hill Book Co.Google Scholar
  4. 4.
    da Silva, M.G., Giasolli, R., Cunningham, S., DeRoo, D. (2002) MEMS design for manufacturability. Sensors Expo. Boston.Google Scholar
  5. 5.
    ASME (2003) Course 469: MEMS Reliability Short Course. New York: ASME.Google Scholar
  6. 6.
    (2003). INTEGRRAM Metal-Nitride Prototyping Kit – Design Handbook, Metal-Nitride Surface Micromachining. QinetiQ Ltd. & Coventor Sarl.Google Scholar

Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  • Allyson L. Hartzell
    • 1
  • Mark G. da Silva
    • 2
  • Herbert R. Shea
    • 3
  1. 1.Lilliputian Systems, Inc.WilmingtonUSA
  2. 2.RSTC, MS-112Analog Devices Inc.WilmingtonUSA
  3. 3.Microsystems for Space Technologies LaboratoryEPFLNeuchatelSwitzerland

Personalised recommendations