Introduction: Reliability of MEMS

  • Allyson L. Hartzell
  • Mark G. da Silva
  • Herbert R. Shea
Part of the MEMS Reference Shelf book series (MEMSRS)


The development of Micro-Electro Mechanical Systems (MEMS) and introduction of MEMS enabled products in the market have made amazing strides in the last two decades; fulfilling a vision of “cheap complex devices of great reliability”. MEMS are integrated micro-scale systems combining electrical, mechanical or other (magnetic, fluidic/thermal/etc.) elements typically fabricated using conventional semiconductor batch processing techniques that range in size from several nanometers to microns or even millimeters [1]. These systems are designed to interact with the external environment either in a sensing or actuation mode to generate state information or control it at a different scale.


Failure Mode Actuation Mode Potential Failure Mode Reliability Challenge Product Development Effort 
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Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  • Allyson L. Hartzell
    • 1
  • Mark G. da Silva
    • 2
  • Herbert R. Shea
    • 3
  1. 1.Lilliputian Systems, Inc.WilmingtonUSA
  2. 2.RSTC, MS-112Analog Devices Inc.WilmingtonUSA
  3. 3.Microsystems for Space Technologies LaboratoryEPFLNeuchatelSwitzerland

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