Semiconductor Manufacturing

  • Sarah Boyd
  • David Dornfeld


Semiconductor manufacturing, one of the fields of manufacturing in which the USA has played a dominant role for decades, is seen as a major consumer of resources and a source of environmental impact. The objective of this chapter is to introduce the basics of semiconductor manufacturing and, then, look at a detailed analysis of the energy and global warming impact of manufacturing one typical semiconductor product, the complementary metal oxide semiconductor (CMOS) chip. Process steps are reviewed, materials, consumables, and waste streams described, and then an example of applying life-cycle analysis to CMOS fabrication and use (including materials processing through transportation and use phases) is presented. The level of data detail required is illustrated along with trends in manufacturing and environmental impact over several technology nodes.


Global Warming Potential Complementary Metal Oxide Semiconductor Chemical Mechanical Planarization Technology Node Global Warming Potential Impact 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media New York 2013

Authors and Affiliations

  1. 1.PE INTERNATIONAL, Inc. & Five Winds Strategic ConsultingBostonUSA
  2. 2.Laboratory for Manufacturing and Sustainability (LMAS), Department of Mechanical EngineeringUniversity of California at BerkeleyBerkeleyUSA

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