Feedback Control of MEMS to Atoms

pp 269-319


Feedback Control of Microflows

  • Mike ArmaniAffiliated withPathogenetics Unit, Laboratory of Pathology, National Cancer InstituteFischell Department of Bioengineering, University of Maryland
  • , Zach CumminsAffiliated withFischell Department of Bioengineering, University of Maryland
  • , Jian GongAffiliated withMicromanufacturing Laboratory, University of California
  • , Pramod MathaiAffiliated withAerospace Engineering, University of Maryland
  • , Roland ProbstAffiliated withFischell Department of Bioengineering, University of Maryland
  • , Chad RoppAffiliated withElectrical Engineering, University of Maryland
  • , Edo WaksAffiliated withElectrical Engineering & Institute for Research in Electronics and Applied Physics (IREAP), University of Maryland
  • , Shawn WalkerAffiliated withDepartment of Mathematics & Center for Computation and Technology (CCT), Louisiana State University
  • , Benjamin ShapiroAffiliated withFischell Department of Bioengineering & Institute for Systems Research, University of Maryland Email author 

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This chapter gives an overview of methods we have developed and experimental results we have achieved for precision feedback control of flows and objects inside microfluidic systems. Essentially, we are doing flow control, but flow control on the microscale, and further even to nanoscale accuracy, to precisely and robustly manipulate liquid packets, particles (e.g., cells and quantum dots), and micro- and nanoobjects (e.g., nanowires). Target applications include methods to miniaturize the operations of a biological laboratory (lab-on-a-chip), e.g., presenting pathogens to on-chip sensing cells or extracting cells from messy biosamples such as saliva, urine, or blood; as well as nonbiological applications such as deterministically placing quantum dots on photonic crystals to make multidot quantum information systems.