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Process Technology and Industrial Processes

  • Mamoru Mizuhashi
Chapter

Abstract

A quick review of the deposition methods that achieved sufficient low resistivities and comparison of these methods in terms of the capability for large area mass production will be made. At the later half our experience on two pilot runs by evaporation and magnetron sputtering machines will be described in detail.

Keywords

Thickness Distribution Thin Film Solar Cell Sheet Glass Color Filter Array Large Area Deposition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgement

The author would like to express sincere thanks to Dr. T. Oyama, Mr. Ishikawa, Mr. T. Haranoh, Dr. Takaki, Prof. Y. Shigesato Dr. K. Suzuki and Mr. T. Iwamatsu for supporting him on this subject.

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Copyright information

© Springer US 2011

Authors and Affiliations

  1. 1.School of Science and EngineeringAoyama-Gakuin UniversitySagamiharaJapan

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