Semiconductor Device Processing

  • Manijeh Razeghi


The first few important steps in the process of fabricating semiconductor devices, involve oxidation, diffusion and ion implantation of dopants. The resulting semiconductor wafer then undergoes a series of additional steps before the final device is obtained, which are shown in the flowchart in Fig. 3.1. The major ones include lithography, etching, metallization and packaging, each of which will be discussed in the present Chapter.


Wafer Surface Direct Patterning Plasma Etching Wire Bonding Semiconductor Wafer 
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Copyright information

© Springer Science+Business Media, LLC 2010

Authors and Affiliations

  • Manijeh Razeghi
    • 1
  1. 1.Walter P. Murphy Professor of Electrical Engineering and Computer ScienceNorthwestern UniversityEvanstonUSA

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