Semiconductor Device Technology

  • Manijeh Razeghi


In the previous Chapter, we have reviewed the various techniques used to synthesize semiconductor crystals and thin films. This represented only the first step in the fabrication of semiconductor devices. Several additional steps are necessary before a final product can be obtained, which will be described in this and the following Chapter.


Silicon Wafer Impurity Concentration Oxide Thickness Junction Depth Sheet Resistivity 
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  1. Jaeger, R.C., Introduction to Microelectronic Fabrication, 2nd Edition, Prentice-Hall, Upper Saddle River, NJ, 2002.Google Scholar
  2. Razeghi, M., The MOCVD Challenge Volume 1: A Survey of GaInAsP-InP for Photonic and Electronic Applications, Adam Hilger, Bristol, UK, pp. 188-193, 1989.Google Scholar
  3. Razeghi, M., The MOCVD Challenge Volume 2: A Survey of GaInAsP-GaAs for photonic and electronic device applications, Institute of Physics, Bristol, UK, 1995.Google Scholar

Further reading

  1. Campbell, S.A., The Science and Engineering of Microelectronic Fabrication, Oxford University Press, New York, 1996.Google Scholar
  2. Diaz, J.E., Fabrication of High Power Aluminum-Free 0.8 μm to 1.0 μm InGaP/InGaAsP/GaAs Lasers for Optical Pumping, Ph.D. dissertation, Northwestern University, 1997.Google Scholar
  3. Fogiel, M., Microelectronics-Principle, Design Techniques, and Fabrication Processes, Research and Education Association, New York, 1968.Google Scholar
  4. Ghandi, S., VLSI Fabrication Principles, John Wiley & Sons, New York, 1983.Google Scholar
  5. Soclof, S., Design and Application of Analog Integrated Circuits, Prentice-Hall, Englewood Cliffs, NJ, pp. 8-23, 1991.Google Scholar
  6. Streetman, B.G., Solid State Electronic Devices, Prentice-Hall, Englewood Cliffs, NJ, pp. 65-70, 1980.Google Scholar
  7. Trumbore, F.A., “Solid solubilities of impurity elements in germanium and silicon,” Bell System Technical Journal 39, pp. 205-233, 1960.Google Scholar

Copyright information

© Springer Science+Business Media, LLC 2010

Authors and Affiliations

  • Manijeh Razeghi
    • 1
  1. 1.Walter P. Murphy Professor of Electrical Engineering and Computer ScienceNorthwestern UniversityEvanstonUSA

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