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The Copper Damascene Process and Chemical Mechanical Polishing

  • Tapan Gupta
Chapter

The American Heritage Illustrated Encyclopedic Dictionary defines damascene as a native inhabitant of Damascus (Damaskus), which is a major city in the north-west of Syria. The word Damask means patterned silk fabrics woven in Damascus, a city notable for manufacturing and shipment of damascened steel sword blades, which were exceptionally hard and resilient. In French, damascene is damas quiner means to decorate in the manner of Damascus blades or steel from Damasquine of Damascus. Thus the word damascene can be taken literally as the process of decorating a metal with wavy patterns of gold or silver. However, in integrated circuits (ICs) the damascene process means an elegant technique of inlaying metal (copper) for interconnect which avoids the complicated process of metal etching.

Keywords

Barrier Layer Chemical Mechanical Polishing Chemical Mechanical Planarization Chemical Mechanical Polishing Process Hard Mask 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.Radiation Monitoring Devices, Inc.WatertownUSA

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