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Piezoelectric-Based Nanomechanical Cantilever Sensors

  • Nader Jalili
Chapter

Abstract

This chapter provides a relatively general overview of piezoelectric-based nano- mechanical cantilever sensors (NMCS) with their applications in many cantilever-based imaging and manipulation systems such as atomic force microscopy (AFM) and its varieties. Some new concepts in modeling these systems are also introduced along with highlighting the issues related to nonlinear effects at such small scale, the Poisson’s effect, and piezoelectric materials nonlinearity. More specifically, both linear and nonlinear models of piezoelectric NMCS are presented with their applications in biological and ultrasmall mass sensing and detection.

It might be worth noting that a comprehensive modeling and treatment of these systems including both linear and nonlinear vibration analyses, system identification, as well as practical applications in ultrasmall mass sensing, laser-free imaging, and nanoscale manipulation and positioning, will appear in a new book by the author (Jalili in press). In order to avoid potential overlaps while also keeping this chapter focused, only a small part of the aforementioned book is presented here with a major emphasis on piezoelectric-based nanomechanical cantilever sensors.

Keywords

Piezoelectric Material Surface Stress Torsional Vibration Piezoelectric Layer Effective Nonlinearity 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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© Springer Science+Business Media, LLC 2010

Authors and Affiliations

  1. 1.Department of Mechanical and Industrial Engineering373 Snell Engineering Center Northeastern UniversityBostonUSA

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