Abstract
Soft X-ray microscopy images of nanostructures where analyzed with a method developed to simultaneously determine the object feature size and image resolution. This method is based on the correlation between the image and a set of templates of known resolution obtained from the original image. The analysis was applied to images obtained with a Fresnel zone plate microscope that uses 13.2 nm wavelength laser light for illumination. The object feature size and the resolution obtained with this method are shown to be in very good agreement with independent measurements of both magnitudes.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
W.L. Chao, B.D. Harteneck, J.A. Liddle, E.H. Anderson, and D.T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15nm”. Nature. 435 1210–1213 2005.
P.A.C. Takman, H. Stollberg, G.A. Johansson, A. Holmberg, M. Lindblom, and H.M. Hertz, “High-resolution compact X-ray microscopy”. Journal of Microscopy-Oxford. 226 175–181 2007.
G. Vaschenko, C. Brewer, E. Brizuela, Y. Wang, M.A. Larotonda, B.M. Luther, M.C. Marconi, J.J. Rocca, and C.S. Menoni, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light”. Optics Letters. 31 1214–1216 2006.
H.M. Hertz, G.A. Johansson, H. Stollberg, J. de Groot, O. Hemberg, A. Holmberg, S. Rehbein, P. Jansson, F. Eriksson, and J. Birch, “Table-top X-ray microscopy: Sources, optics and applications”. Journal De Physique Iv. 104 115– 119 2003.
J. Heck, Attwood, D.T., Meyer-Ilse, W., Anderson, E.H., “Resolution determination in X-ray microscopy: an analysis of the effects of partial coherence and illumination spectrum”. Journal of X-Ray Science and Technology. 8 95–104 1998.
Y. Wang, M.A. Larotonda, B.M. Luther, D. Alessi, M. Berrill, V.N. Shlyaptsev, and J.J. Rocca, “Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm”. Physical Review A. 72 2005.
J.J. Rocca, Y. Wang, M.A. Larotonda, B.M. Luther, M. Berrill, and D. Alessi, “Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium”. Optics Letters. 30 2581–2583 2005.
E.H. Anderson, “Specialized electron beam nanolithography for EUV and X-ray diffractive optics”. Ieee Journal Of Quantum Electronics. 42 27–35 2006.
E.H. Anderson, D.L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W.L. Chao, A. Lucero, L. Johnson, and D. Attwood, “Nanofabrication and diffractive optics for high-resolution x-ray applications”. Journal Of Vacuum Science & Technology B. 18 2970–2975 2000.
T. Yatagai, S. Nakadate, M. Idesawa, and H. Saito, “Automatic fringe analysis using digital image processing techniques”. Optical Engineering. 21 432–435 1982.
P.W. Wachulak, Brewer, C.A., Brizuela, F., Chao, W., Anderson, E.H., Bartels, R.A., Menoni, C.S., Rocca, J.J., Marconi, M.C., “Simultaneous determination of feature size and resolution in soft x-ray microscopy images “. Journal of the Optical Society of America B. 25 B20–B26 2008.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2009 Springer
About this paper
Cite this paper
Marconi, M.C. et al. (2009). Resolution and Feature Size Assessment in Soft X-Ray Microscopy Images. In: Lewis, C.L.S., Riley, D. (eds) X-Ray Lasers 2008. Springer Proceedings in Physics, vol 130. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-9924-3_57
Download citation
DOI: https://doi.org/10.1007/978-1-4020-9924-3_57
Publisher Name: Springer, Dordrecht
Print ISBN: 978-1-4020-9923-6
Online ISBN: 978-1-4020-9924-3
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)