Gas Phase Study of The Reactivity of Optical Coating Materials with Hydrocarbons Using a Compact Soft X-Ray Laser

  • S. Heinbuch
  • F. Dong
  • E. R. Bernstein
  • J. J. Rocca
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 130)

Abstract

The reactivity of prospective capping layer extreme ultraviolet (EUV) mirror materials with hydrocarbons, alcohols, and water is studied in the gas phase using mass spectroscopy of metal-oxide clusters. We report the results of chemistry studies for Si, Ti, Hf, Zr, and Ru metal oxide nanoclusters in which the reaction products were ionized with little or no fragmentation by 26.5 eV photons from a desktop size 46.9 nm Ne-like Ar laser. Hf and Zr oxides are found to be much less reactive than Si or Ti oxides in the presence soft x-ray light. Ru oxides show different chemistry and are inactive with water/alcohols, and active with saturated/unsaturated hydrocarbons.

Keywords

Titanium Zirconium Hydrocarbon Resid Acetylene 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    J. Hollenshead, and L. Klebanoff, J. Vac. Sci. Technol. B 24(1), 118 (2006).CrossRefGoogle Scholar
  2. 2.
    B. Mertens, M. Weiss, H. Meiling, R. Klein, E. Louis, R. Kurt, M. Wedowski, H. Trenkler, B. Wolschrijn, R. Jansen, A. Runstraat, R. Moors, K. Spee, S. Pl€oger, R. Kruijs, Microelec. Eng. 73–74, 16 (2004).CrossRefGoogle Scholar
  3. 3.
    H. Meiling, B. Mertens, F. Stietz, M. Wedowski, R. Klein, R. Kurt, E. Loius, and A. Yakshin, SPIE 4506, 93 (2001).CrossRefADSGoogle Scholar
  4. 4.
    K. Boller, R.-P. Haelbich, H. Hogrefe, W. Jark, and C. Kunz, Nucl. Inst. Meth. 208, 273 (1983).CrossRefGoogle Scholar
  5. 6.
    G. Kyriakou, D.J. Davis, R.B. Grant, D.J. Watson, A. Keen, M.S. Tikhov, and R.M. Lambert, J. Phys. Chem. C 111, 4491 (2007).CrossRefGoogle Scholar
  6. 7.
    T. Engel, Surf. Sci. Rep. 18, 91(1993).CrossRefADSMathSciNetGoogle Scholar
  7. 8.
    G.Y. Mcdaniel, S.T. Fenstermaker, D.E. Walker Jr., W.V. Lampert, S.M. Mukhopadhyay, and P.H. Holloway, Surf. Sci. 445, 159 (2000).CrossRefADSGoogle Scholar
  8. 9.
    T. Miyake, S. Soeki, H. Kato, A. Namiki, H. Kamba, and T. Suzaki, Phys. Rev. B 42, 11801 (1990).CrossRefADSGoogle Scholar
  9. 10.
    R. Roseberg et. al., Nucl. Inst. and Meth. in Phys. Research A 291, 101 (1990).CrossRefADSGoogle Scholar
  10. 11.
    T. Koide et. al., Nucl. Inst. and Meth. in Phys. Research A 246, 215 (1986).CrossRefADSGoogle Scholar
  11. 12.
    M.E. Malinowski, P. Grunow, C. Steinhaus, W.M. Clift, and L.E. Klebanoff, SPIE 4343, 347 (2001).CrossRefADSGoogle Scholar
  12. 13.
    C. Tarrio, and S. Grantham, Rev. Sci. Instrum. 76, 056101 (2005).CrossRefADSGoogle Scholar
  13. 14.
    F. Dong, S. Heinbuch, J.J. Rocca, and E.R. Bernstein, J. Chem. Phys. 124, 224319 (2006); S. Heinbuch, F. Dong, J.J. Rocca, and E.R. Bernstein, J. Chem. Phys. 125, 154316 (2006); F. Dong, S. Heinbuch, J.J. Rocca, and E.R. Bernstein, J. Chem. Phys. 125, 154317 (2006); F. Dong, S. Heinbuch, J.J. Rocca, and E.R. Bernstein, J. Chem. Phys. 125, 164318 (2006); S. Heinbuch, F. Dong, J.J. Rocca, and E.R. Bernstein, J. Chem. Phys. 126, 244301 (2007); F. Dong, S. Heinbuch, Y. Xie, J.J. Rocca, Z. Wang, K. Deng, S. He, and E.R. Bernstein, J. Am. Chem. Soc. 130, 1932 (2008).CrossRefADSGoogle Scholar
  14. 20.
    S. Heinbuch, M. Grisham, D. Martz, and J.J. Rocca, Opt. Exp. 13, 4050–4055 (2005); S. Heinbuch, M. Grisham, D. Martz, F. Dong, E. R. Bernstein, and J. J. Rocca, SPIE 5919, 591907 (2005).CrossRefADSGoogle Scholar
  15. 22.
    M. E. Geusic, M. D. Morse, S. C. O'Brien, R. E. Smalley, Rev. Sci. Instrum. 56, 2123 (1985).CrossRefADSGoogle Scholar
  16. 23.
    Y. Matsuda and E.R. Bernstein, J. Phys. Chem. A, 109 (2), 314 –319 (2005).CrossRefGoogle Scholar
  17. 25.
    M. Ritala, M. Leskelä, L. Niinistö, T. Prohaska, G. Friedbacher and M. Grasserbauer, Thin Solid Films 250, 72 (1994).CrossRefADSGoogle Scholar

Copyright information

© Springer 2009

Authors and Affiliations

  • S. Heinbuch
    • 1
    • 2
  • F. Dong
    • 1
    • 3
  • E. R. Bernstein
    • 1
    • 3
  • J. J. Rocca
    • 1
    • 2
    • 4
  1. 1.NSF ERC for Extreme Ultraviolet Science and TechnologyColorado State UniversityUSA
  2. 2.Department of Electrical and Computer EngineeringColorado State UniversityUSA
  3. 3.Department of ChemistryColorado State UniversityUSA
  4. 4.Department of PhysicsColorado State UniversityUSA

Personalised recommendations