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Recent Advances in Boundary Element Methods pp 93–111Cite as

Boundary Integral Equations and Fluid-Structure Interaction at the Micro Scale

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Abstract

Providing an estimate of gas damping in Micro-Electro-Mechanical-Systems (MEMS) is a complex task since MEMS are fully three dimensional micro-structures which cannot in general be reduced to simple 1D or 2D models and since the gas cannot be treated as a continuum medium at the microscale. Moreover, the range of working pressures is extremely large, starting from standard conditions down to almost vacuum. We show that integral equations are the ideal tool for addressing this issue both at standard conditions and at near-vacuum. In the former case robust formulations and industrial codes have already been developed for large scale problems employing Fast Solvers and implementing a linear, quasi-static, incompressible Stokes formulation with slip boundary conditions. In the latter situation, on the contrary, the development is technically less mature but very promising. The tools investigated herein are eventually applied to the analysis of an industrial MEMS sensor produced and tested by STMicroelectronics.

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Author information

Authors and Affiliations

  1. Department of Structural Engineering, Politecnico of Milano, Milano, Italy

    Attilio Frangi

Authors
  1. Attilio Frangi
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Editor information

Editors and Affiliations

  1. Department of Civil Engineering, Aristotle University, 54124 Thessaloniki, Greece

    George D. Manolis (Professor) (Professor)

  2. Department of Mechanical Engineering and Institute of Chemical Engineering&High Temperature Processes, University of Patras, 265 00 Patras, Greece

    D. Polyzos

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Frangi, A. (2009). Boundary Integral Equations and Fluid-Structure Interaction at the Micro Scale. In: Manolis, G.D., Polyzos, D. (eds) Recent Advances in Boundary Element Methods. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-9710-2_8

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  • DOI: https://doi.org/10.1007/978-1-4020-9710-2_8

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-1-4020-9709-6

  • Online ISBN: 978-1-4020-9710-2

  • eBook Packages: EngineeringEngineering (R0)

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