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Ultrasonic Atomic Force Microscopy of Subsurface Defects

  • K. Yamanaka
  • K. Kobari
  • S. Ide
  • T. Tsuji
Part of the Acoustical Imaging book series (ACIM, volume 29)

Abstract

We show principle, implementation and remarkable applications of ultrasonic atomic force microscopy (UAFM) to evaluation of components with scientific and technological importance. In particular, carbon fiber in CFRP, domain of ferroelectric PZT and subsurface delamination of electrodes in microdevices are shown. We also show lateral modulation atomic force microscopy (LM-AFM) with application to a carbon nanotube composite and discuss its extension using combination with UAFM.

Key words

Ultrasonic atomic force microscopy Defects Contact resonance Stiffness 

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Copyright information

© Springer Science+Business Media B.V. 2008

Authors and Affiliations

  • K. Yamanaka
    • 1
  • K. Kobari
    • 1
  • S. Ide
    • 1
  • T. Tsuji
    • 1
  1. 1.Dept. Material Processing, Graduate School of EngineeringTohoku UniversitySendaiJapan

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