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Organic-Based Micropillar Structure Fabrication by Advanced Focused Ion Beam Milling Techniques

  • Wen-Chang Hung
  • Ali M Adawi
  • Ashley Cadby
  • Liam G Connolly
  • Richard Deanl
  • Abbes Tahraoui
  • A M Fox
  • David G Lidzey
  • A G Cullis
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 120)

Summary

In this study, we first report organic material based micropillar structures fabricated using advanced techniques based upon focused ion beam milling processes. Such a method provides a faster milling procedure as the beam of ions directly etches through the layers of the materials without damaging the organic material, unlike conventional dry or wet etching processes. It is very promising that FIB milling methods should be able to underpin organic-based photonic device research in the future.

Keywords

Cavity Mode Distribute Bragg Reflector Optical Confinement Planar Cavity Tellurium Dioxide 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media B.V. 2008

Authors and Affiliations

  • Wen-Chang Hung
    • 1
  • Ali M Adawi
    • 1
    • 2
  • Ashley Cadby
    • 1
    • 2
  • Liam G Connolly
    • 1
    • 2
  • Richard Deanl
    • 1
    • 2
  • Abbes Tahraoui
    • 1
  • A M Fox
    • 1
    • 2
  • David G Lidzey
    • 1
    • 1
  • A G Cullis
    • 1
  1. 1.Department of Electronic and Electrical EngineeringUniversity of SheffieldSheffieldUK
  2. 2.Department of Physics and Astronomythe University of SheffieldSheffieldUK

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