Novel Method for the Measurement of STEM Specimen Thickness by HAADF Imaging
The accurate measurement of chemistry of epitaxial layers by high angle annular dark field imaging requires knowledge of the scanning transmission electron microscopy specimen thickness. Here, it is shown how the study of the intensity of the Fourier coefficients of high angle annular dark field images, as a function of the objective lens defocus, can be used to measure the specimen thickness with the highest accuracy in the location of the area of interest.
KeywordsMilling GaAs Kelly Astigmatism
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- 1.Pennycook S J 2002 Advances in Imaging and Electron Physics 123, Academic Press New YorkGoogle Scholar
- 6.Williams D B and Carter C B 1996 “Transmission Electron Microscopy” Plenum Press, N.Y. 678Google Scholar
- 9.Grillo V, Verecchia P, Rosato V and Carlino E 2005 Proceedings MCEM VII Portoroze (Slovenia) 163Google Scholar