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The Effect of Silane Treatment of AlxGa1−xN Surfaces

  • N Ketteniss
  • M J Kappers
  • C McAleese
  • R A Oliver
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 120)

Summary

AlxGa1−xN epilayers grown by metal-organic vapour-phase epitaxy have been treated in situ, post-growth with silane and ammonia with the aim of increasing the size of the surface pits relating to threading dislocations, in order to allow easy quantification of the dislocation density. The treatment was successful for relaxed samples, but resulted in the formation of nanoscale hillocks for epilayers under tensile strain.

Keywords

Crack Density Silane Treatment Contact Mode Atomic Force Microscopy Easy Quantification High Crack Density 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media B.V. 2008

Authors and Affiliations

  • N Ketteniss
    • 1
  • M J Kappers
    • 1
  • C McAleese
    • 1
  • R A Oliver
    • 1
  1. 1.Department of Materials Science and MetallurgyUniversity of CambridgeCambridgeUK

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