The Factors Influencing the Stability of Scanning Capacitance Spectroscopy
We have used front-wing conductive probes to investigate the factors that most obviously influence the stability of scanning capacitance spectroscopy (SCS). Photoperturbations and environmental humidity are the dominant factors influencing SCS stability of samples with a thermal oxide layer. Without photoperturbation and humidity problems, the peak difference between the traced and retraced SCS curves was stable, depending only on the dielectric thin film of the studied samples. The experimental results indicate that non-photoperturbed SCS with a dry ambient is a practical method for investigating the quality of dielectric thin films.
KeywordsEnvironmental Humidity Dielectric Film Surface Trap Hysteresis Behavior Conductive Probe
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