The Factors Influencing the Stability of Scanning Capacitance Spectroscopy

  • Mao-Nan Chang
  • Tung-Huan Chou
  • Che-Yu Yang
  • Jeng-Hung Liang
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 120)

Summary

We have used front-wing conductive probes to investigate the factors that most obviously influence the stability of scanning capacitance spectroscopy (SCS). Photoperturbations and environmental humidity are the dominant factors influencing SCS stability of samples with a thermal oxide layer. Without photoperturbation and humidity problems, the peak difference between the traced and retraced SCS curves was stable, depending only on the dielectric thin film of the studied samples. The experimental results indicate that non-photoperturbed SCS with a dry ambient is a practical method for investigating the quality of dielectric thin films.

Keywords

Dioxide 

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Copyright information

© Springer Science+Business Media B.V. 2008

Authors and Affiliations

  • Mao-Nan Chang
    • 1
  • Tung-Huan Chou
    • 1
  • Che-Yu Yang
    • 2
  • Jeng-Hung Liang
    • 2
  1. 1.Division of Nano MetrologyNational Nano Device LaboratoriesHsinchuTaiwan
  2. 2.Department of Engineering and System ScienceNational Tsing Hua UniversityHsinchuTaiwan

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