In electro-thermal-compliant (ETC) actuators, a voltage is applied to the electrical terminals of the device. The potential difference induces currents to flow throughout the device, which cause the temperature to rise due to Joule heating. ETC actuators use the resulting thermal expansion to create motion. Typically, they also have some method of amplifying these small displacements into useable motion.
KeywordsConvection Brittle Trench Dmax Poly Silicon
Unable to display preview. Download preview PDF.
- L. Que. Bent-beam electrothermal actuators — part 1: Single beam and cascaded devices. jmems, 10(2):247–254,2001.Google Scholar
- O. Sigmund. Design of multiphysics actuators using topology optimization — part 1: Onematerial structures. Computer Methods in APplied Mechanics and Engineering, 190(49–50):6577–6604, 2001.Google Scholar