In electro-thermal-compliant (ETC) actuators, a voltage is applied to the electrical terminals of the device. The potential difference induces currents to flow throughout the device, which cause the temperature to rise due to Joule heating. ETC actuators use the resulting thermal expansion to create motion. Typically, they also have some method of amplifying these small displacements into useable motion.
KeywordsJoule Heating Poly Silicon Thermal Actuator Temperature Dependent Resistivity Grey Material
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