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Micro-Cantilevers for Thin Films: Young’s Modulus

  • G. J. McShane
  • M. Boutchich
  • S. Phani
  • D. F. Moore
  • T. J. Lu
Conference paper
Part of the Solid Mechanics and its Applications book series (SMIA, volume 144)

Abstract

A simple and effective characterisation technique based on micro-cantilever beams for thin film materials using commonly available equipment — scanning surface profiler — is described. The advantages of this class of techniques are simplicity, speed, cost and a wide applicability. A technique for extracting the Young’s modulus from static deflection data is developed and validated in experiments on thin film specimens of silicon nitride deposited on a silicon substrate under different conditions. Finite element analysis is used to assess the influence of factors affecting the bending of thin films, and thus guide the analysis of micro-cantilever deflection data for reliable characterisation of the material.

Key words

MEMS materials thin films cantilevers scanning surface profiler finite element methods elastic modulus 

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Copyright information

© Springer 2007

Authors and Affiliations

  • G. J. McShane
    • 1
  • M. Boutchich
    • 1
  • S. Phani
    • 1
  • D. F. Moore
    • 1
  • T. J. Lu
    • 1
    • 2
  1. 1.Cambridge University Engineering DepartmentCambridgeUK
  2. 2.School of AerospaceXian Jiaotong UniversityXianP.R. China

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