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MEMS Tunable Dielectric Resonator

  • Conference paper

Part of the book series: NATO Science Series ((NAII,volume 233))

Abstract

We present a novel approach for tuning of dielectric resonators by microelectromechanical switches (MEMS). The concept is based on intermodal coupling between the TE01δ mode of a cylindrical dielectric resonator and a planar slotline resonator. The resonance frequency of the resonator can be changed by MEMS switch leading to variation of the coupling between the planar resonator mode and the TE01δ mode. As a consequence, the resonance frequency of the TE01δ mode changes.

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References

  1. Rebeiz GM, Muldavin JB (2001). Revue HF (Belgium) 2:39–52

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  2. Klein N (2003) “Microwave Communication Systems: Novel Approaches for Passive Devices”. In: Waser R (ed) Nanoelectronics and Information Technology, Wiley, New York

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  3. Kajfez D (1986). In: Kajfez D, Guillon P (eds) Dielectric resonators. Artech House, Dedham, MA

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  4. Rozzi M et al. (1990). IEEE Trans MTT-38:1069–1078

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© 2006 Springer

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Panaitov, G., Ott, R., Klein, N. (2006). MEMS Tunable Dielectric Resonator. In: Gross, R., Sidorenko, A., Tagirov, L. (eds) Nanoscale Devices - Fundamentals and Applications. NATO Science Series, vol 233. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-5107-4_6

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