Handbook of Materials Modeling

pp 1039-1049

Texture Evolution During Thin Film Deposition

  • Hanchen HuangAffiliated withDepartment of Mechanical, Aerospace and Nuclear Engineering, Rensselaer Polytechnic Institute

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The modeling of materials processing intrinsically spans multiple scales, in terms of both space and time. The modeling of thin film deposition, together with the accompanying texture evolution, spans 15 orders of magnitude in time, from fundamental atomic vibration period of 10−13 s to deposition duration of 102 s. This section describes challenging issues, critically presents existing approaches, and offers an outlook of future developments in the modeling of thin film texture evolution.