Abstract
The paper demonstrates a possibility for effective modification of the thin-film material’ chemical composition, structure and physical properties as result of selective removal of atoms by the certain energy ion beam. One of the most promising results of this effect consists in developing the new technology for 3D micro-and nano-structures production for various applications.
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© 2004 Springer Science+Business Media Dordrecht
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Gurovich, B. et al. (2004). Selective Removal of Atoms as a New Method for Manufacturing of Nanostructures for Various Applications. In: Aktaş, B., Tagirov, L.R., Mikailov, F. (eds) Nanostructured Magnetic Materials and their Applications. NATO Science Series, vol 143. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-2200-5_2
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DOI: https://doi.org/10.1007/978-1-4020-2200-5_2
Publisher Name: Springer, Dordrecht
Print ISBN: 978-1-4020-2004-9
Online ISBN: 978-1-4020-2200-5
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