Skip to main content

Abstract

Spin coating is a simple process for rapidly depositing thin coatings onto relatively flat substrates. The substrate to be covered is held by some rotatable fixture (often using vacuum to clamp the substrate in place) and the coating solution is dispensed onto the surface; the action of spinning causes the solution to spread out and leave behind a very uniform coating of the chosen material on the surface of the substrate. The spin coating process has been studied extensively in the past and much is known about factors that control coating deposition and the final thickness of the deposit that results [1–10].

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 169.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 219.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. A. G. Emslie, F. T. Bonner, C. G. Peck, Flow of a Viscous Liquid on a Rotating Disk, J. Appl. Phys., 29, 858 (1958)

    Article  CAS  Google Scholar 

  2. D. Meyerhofer, Characteristics of resist films produced by spinning, J. Appl. Phys., 49, 3993 (1978)

    Article  Google Scholar 

  3. D. F. Bornside, C. W. Macosko, L. E. Scriven, On the modeling of Spin coating, J. Imaging Techn., 13, 122 (1987)

    CAS  Google Scholar 

  4. W. W. Flack, D. S. Soong, A. T. Bell, D. W. Hess, A mathematical model for spin coating of polymer resists, J. Appl. Phys., 56, 1199 (1984)

    Article  CAS  Google Scholar 

  5. C. J. Lawrence, The mechanics of spin coating of polymer films, Phys. Fluids, 31, 2786 (1988)

    Article  CAS  Google Scholar 

  6. C. J. Lawrence, Spin coating with slow evaporation, Phys. Fluids, A2, 453 (1990)

    Article  CAS  Google Scholar 

  7. C. J. Lawrence, W. Zhou, Spin coating of non-Newtonian fluids, J. of Non-Newtonian Fluid Mechanics, 39, 137 (1991)

    Article  CAS  Google Scholar 

  8. T. Ohara, Y. Matsumoto, H. Ohashi, The film formation dynamics in spin coating, Phys. Fluids, A1, 1949 (1989)

    CAS  Google Scholar 

  9. S. Shimoji, A new analytical model for spin coating process with solvent evaporation, Jpn. J. Appl. Phys., 26, L905 (1987)

    Article  Google Scholar 

  10. S. A. Jenekhe, Effects of Solvent Mass Transfer on Flow of Polymer Solutions on a Flat Rotating Disk, Ind. Eng. Chem. Fundam., 23, 425 (1984)

    Article  CAS  Google Scholar 

  11. More extensive information about coating quality and the spin coating process can be found at: http://www.mse.arizona.edu/faculty/bimie/Coatings/index.htm

    Google Scholar 

  12. D. E. Haas, J. N. Quijada, S. J. Picone, D. P. Birnie, III, Effect of Solvent Evaporation Rate on Skin Formation During Spin Coating of Complex Solutions, in Sol-Gel Optics V, B. S. Dunn, E. J. A. Pope, H. K. Schmidt, M. Yamane (eds.), Proc. SPIE, 3943, 280 (2000)

    Google Scholar 

  13. D. P. Birnie, III, M. Manley, Combined Flow and Evaporation of Fluid on a Spinning Disk, Physics of Fluids, 9, 870 (1997)

    Article  CAS  Google Scholar 

  14. D. P. Birnie, III, Combined Flow and Evaporation During Spin Coating of Complex Solutions, J. Non-Crystalline Solids, 218, 174 (1997)

    Google Scholar 

  15. J. Gu, M. D. Bullwinkel, G. A. Campbell, Measurement and modeling of solvent removal for spin coating. Polym Engrg. and Sci., 36, 1019 (1996)

    Article  CAS  Google Scholar 

  16. F. Horowitz, E. Yeatman, E. Dawnay, A. Fardad, Real-time optical monitoring of spin coating, J. Phys. III France, 3, 2059 (1993)

    Article  CAS  Google Scholar 

  17. F. Horowitz, E. Yeatman, E. Dawnay, A. Fardad, Optical monitoring of the sol to gel transition in spinning silica films”, in Sol-Gel Optics III, SPIE Proc., 2288, 67 (1994)

    Article  CAS  Google Scholar 

  18. PZT coatings were made using a recipe based on that developed by R. A. Assink and R. W. Schwartz, Chem. Mat., 5, 51 1(1993)

    Google Scholar 

  19. B. K. Daniels, C. R. Szmanda, M. K. Templeton, P. Trefonas III, Surface tension effects in microlithography — striations, in Advances in Resist Technology and Processing III, SPIE Proc., 631, 192 (1986)

    Article  CAS  Google Scholar 

  20. X. M. Du, X. Orignac, R. M. Almeida, Striation-Free, Spin-Coated Sol-Gel Optical Films, J. Am. Ceram. Soc., 78, 2254 (1995)

    Article  CAS  Google Scholar 

  21. L. E. Scriven, C. V. Sternling, The Marangoni Effects, Nature, 187, 186 (1960)

    Article  Google Scholar 

  22. J. Thomson, On certain curious motions observable at the surfaces of wine and other alcoholic liquors, Phil. Mag., 10, 330 (1855)

    Google Scholar 

  23. D. P. Birnie, III, Rational Solvent Selection Strategies to Combat Striation Formation during Spin Coating of Thin Films, J. Materials Research, 16 (4), 1145 (2001)

    Article  CAS  Google Scholar 

  24. D. J. Taylor, D. P. Birnie, III, Striation Prevention by Targeted Formulation Adjustment: Aluminum Titanate Sol-Gel Coatings, Chemistry of Materials, 14, 1488 (2002)

    Article  CAS  Google Scholar 

  25. J. A. Britten, I. M. Thomas, Non-Newtonian flow effects during spin coating large-area optical coatings with colloidal suspensions”, J. Appl. Phys., 71, 972 (1992)

    Article  CAS  Google Scholar 

  26. D. P. Brinic, III, B. J. J. Zelinski, S. P. Marvel, S. M. Melpolder, R. Roncone, Film/Substrate/Vacuum-Chuck Interactions During Spill Coating, Optical Engineering, 31, 2012 (1992)

    Article  Google Scholar 

  27. D. P. Birnie, III, B. J. J. Zelinski, D. L. Perry, Infrared Observation of Evaporative Cooling During Spill Coating Processes, Optical Engineering, 34, 1782 (1995)

    Article  Google Scholar 

Download references

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2004 Springer Science+Business Media New York

About this chapter

Cite this chapter

Birnie, D.P. (2004). Spin Coating Technique. In: Aegerter, M.A., Mennig, M. (eds) Sol-Gel Technologies for Glass Producers and Users. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-88953-5_4

Download citation

  • DOI: https://doi.org/10.1007/978-0-387-88953-5_4

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4419-5455-8

  • Online ISBN: 978-0-387-88953-5

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics