Abstract
A simple layer structure composed of a metal thin film and a porous silicon layer on a silicon substrate generates intense and wide-band airborne ultrasounds. The large-bandwidth and the fidelity of the sound reproduction are leveraged in applications varying from sound-based measurement to a scientific study of animal ecology. This chapter describes the basic principle of the ultrasound generation. The macroscopic properties of the low thermal conductivity and the small heat capacity of nanocrystalline porous silicon thermally induce ultrasonic emission. The state-of-the-art of the achievable sound pressure and sound signal properties is introduced, with the technological and scientific applications of the devices.
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Shinoda*, H., Koshida, N. (2009). Ultrasonic Emission from Nanocrystalline Porous Silicon. In: Koshida, N. (eds) Device Applications of Silicon Nanocrystals and Nanostructures. Nanostructure Science and Technology. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-78689-6_11
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DOI: https://doi.org/10.1007/978-0-387-78689-6_11
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-387-78688-9
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