Fabrication Techniques for Microresonators
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The theories presented in this book have been around for a very long time. Only recently, due to advances in fabrication technology, have the realization of microresonators become a possibility. Indeed their great potential is tempered only by the challenges associated with their construction. In this chapter, we present the key fabrication issues involved with microresonators. Due to the authors' expertise with III–V semiconductor fabrication techniques, detailed process flows are presented for AlGaAs- and InP-based material systems.
KeywordsFabrication Technique Versus Semiconductor Wafer Bonding Indium Phosphide Hard Mask
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