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Properties of Photoresist Polymers

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Physical Properties of Polymers Handbook

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References

  1. SIA International Technology Roadmap for Semiconductors; Inter-national Sematech: Austin, Texas, 2004.

    Google Scholar 

  2. Dammel, R. Diazonaphthoquinone-Based Resists; SPIE Press: Bellingham, Washington, USA, 1993.

    Google Scholar 

  3. Macdonald, S. A.; Willson, C. G.; Frechet, J. M. J. Accounts of Chemical Research 1994, 27, 151.

    Article  CAS  Google Scholar 

  4. Reichmanis, E.; Thompson, L. F. Chem. Rev. 1989, 89, 1273.

    Article  CAS  Google Scholar 

  5. Willson, C. G. In Introduction to Microlithography, 2nd ed, Thomp-son, L. F., Willson, C. G., Bowden, M. J., Eds.; American Chemical Society: Washington, DC, 1994, pp. 139-258.

    Google Scholar 

  6. Ito, H. Adv. Polym. Sci. 2005, 172, 37-245.

    CAS  Google Scholar 

  7. Frechet, J. M. J.; Willson, C. G.; Ito, H. Proceedings of Microcircuit Engineering 1982, 260.

    Google Scholar 

  8. Ito, H.; Willson, C. G.; Frechet, J. M. J. Digest of Technical Papers of 1982 Symposium on VLSI Technology 1982, P86.

    Google Scholar 

  9. Ito, H. Advances in Polymer Science 2005, 172, 37-245.

    CAS  Google Scholar 

  10. Kunz, R. In Physical Properties of Polymers; Mark, J. E., Ed.; Springer: New York 1995, pp. 637-642.

    Google Scholar 

  11. Allen, R. D.; Wallraff, G. M.; Hinsberg, W. D.; Conley, W. E.; Kunz, R. R. Solid State Technology 1993, 36, 53.

    Article  CAS  Google Scholar 

  12. Nozaki, K.; Kaimoto, Y.; Takahashi, M.; Takechi, S.; Abe, N. Chem-istry of Materials 1994, 6, 1492-1498.

    Article  CAS  Google Scholar 

  13. Nozaki, K.; Watanabe, K.; Namiki, T.; Igarashi, M.; Kuramitsu, Y.; Yano, E. Japanese Journal of Applied Physics Part 2-Letters 1996, 35, L528-L530.

    Article  CAS  Google Scholar 

  14. Nozaki, K.; Yano, E. Journal of Photopolymer Science and Technol-ogy 1998, 11(3), 493-498.

    Article  CAS  Google Scholar 

  15. Okoroanyanwu, U.; Shimokawa, T.; Byers, J.; Medeiros, D.; Willson, C. G.; Niu, Q. J.; Frechet, J. M. J.; Allen, R. Proceedings of the SPIE—The International Society for Optical Engineering 1997, 3049,92-103.

    CAS  Google Scholar 

  16. Wallow, T. I.; Houlihan, F. M.; Nalamasu, O.; Chandross, E. A.; Neenan, T. X.; Reichmanis, E. Proceedings of the SPIE—The Inter-national Society for Optical Engineering 1996, 2724, 355-364.

    Google Scholar 

  17. Kunz, R. R.; Bloomstein, T. M.; Hardy, D. E.; Goodman, R. B.; Downs, D. K.; Curtin, J. E. Journal of Vacuum Science and Technol-ogy B 1999, 17, 3267-3272.

    Article  CAS  Google Scholar 

  18. Crawford, M. K.; Feiring, A. E.; Feldman, J.; French, R.; Periyasamy, M.; Schadt, F. L.; Smalley, R. J.; Zumsteg, F. C.; Kunz, R.; Rao, V.; Liao, L.; Holl, S. In Proceedings of the SPIE—The International Society for Optical Engineering: Advances in Resist Technology and Processing XVii; Houle, F., Ed.; SPIE: 2000; Vol. 3999, p. 357.

    Google Scholar 

  19. Chiba, T.; Hung, R. J.; Yamada, S.; Trinque, B.; Yamachika, M.; Brodsky, C.; Patterson, K.; Vander Heyden, A.; Jamison, A.; Shang-Ho, L.; Somervell, M.; Byers, J.; Conley, W.; Willson, C. G. Journal of Photopolymer Science and Technology 2000, 13(4), 657-664.

    Article  CAS  Google Scholar 

  20. Dammel, R. R.; Sakamuri, R.; Romano, A.; Vicari, R.; Hacker, C.; Conley, W.; Miller, D. Proceedings of the SPIE—The International Society for Optical Engineering 2001, 4345, pt.1-2, 350-360.

    Google Scholar 

  21. Ito, H.; Wallraff, G. M.; Brock, P.; Fender, N.; Truong, H.; Breyta, G.; Miller, D. C.; Sherwood, M. H.; Allen, R. D. Proceedings of the SPIE—The International Society for Optical Engineering 2001, 4345, pt.1-2, 273-284.

    Google Scholar 

  22. Kunz, R. R.; Sinta, R.; Sworin, M.; Mowers, W. A.; Fedynyshyn, T. H.; Liberman, V.; Curtin, J. E. Proceedings of the SPIE—The Inter-national Society for Optical Engineering 2001, 4345, pt.1-2, 285-295.

    Google Scholar 

  23. Ito, H.; Truong, H. D.; Okazaki, M.; Miller, D. C.; Fender, N.; Breyta, G.; Brock, P. J.; Wallraff, G. M.; Larson, C. E.; Allen, R. D. Proceedings of the SPIE—The International Society for Optical Engineering 2002, 4690, 18-28.

    CAS  Google Scholar 

  24. Trinque, B. C.; Chiba, T.; Hung, R. J.; Chambers, C. R.; Pinnow, M. J.; Osburn, B. P.; Tran, H. V.; Wunderlich, J.; Hsieh, Y. T.; Thomas, B. H.; Shafer, G.; DesMarteau, D. D.; Conley, W.; Willson, C. G. Journal Of Vacuum Science and Technology B 2002, 20, 531-536.

    Article  CAS  Google Scholar 

  25. Trinque, B. C.; Osborn, B. P.; Chambers, C. R.; Yu-Tsai, H.; Corry, S. B.; Chiba, T.; Hung, R. J.; Tran, H. V.; Zimmerman, P.; Miller, D.; Conley, W.; Willson, C. G. Proceedings of the SPIE—The Inter-national Society for Optical Engineering 2002, 4690, 58-68.

    CAS  Google Scholar 

  26. Kodama, S.; Kaneko, I.; Takebe, Y.; Okada, S.; Kawaguchi, Y.; Shida, N.; Ishikawa, S.; Toriumi, M.; Itani, T. Proceedings of the SPIE—The International Society for Optical Engineering 2002, 4690, 76-83.

    CAS  Google Scholar 

  27. Fedynyshyn, T. H.; Mowers, W. A.; Kunz, R.; Sinta, R.; Sworin, M.; Cabral, A.; Curtin, J. E. In Polymers fir Microelectronics and Nanoe-lectronics; Lin, Q., Pearson, R. A., Hedrick, J. C., Eds.; American Chemical Society: Washington, DC, 2004; vol. 784, pp. 54-71.

    Google Scholar 

  28. Bae, Y. C.; Douki, K.; Yu, T. Y.; Dai, J. Y.; Schmaljohann, D.; Koerner, H.; Ober, C. K. Chemistry of Materials 2002, 14, 1306-1313.

    Google Scholar 

  29. Fedynyshyn, T. H.; Kunz, R. R.; Sinta, R. F.; Sworin, M.; Mowers, W. A.; Goodman, R. B.; Doran, S. P. Proceedings of the SPIE—The International Society for Optical Engineering 2001, 4345, pt. 1-2, 296-307.

    Google Scholar 

  30. Dammel, R. R.; Sakamuri, R.; Sang-Ho, L.; Rahman, M. D.; Kudo, T.; Romano, A. R.; Rhodes, L. F.; Lipian, J.; Hacker, C.; Barnes, D. A. Proceedings of the SPIE—The International Society for Optical En-gineering 2002, 4690, 101-109.

    CAS  Google Scholar 

  31. Allen, R. D.; Chen, K. J. R.; Gallagher-Wetmore, P. M. Proceedings of the SPIE—The International Society for Optical Engineering 1995, 2438,250-260.

    Google Scholar 

  32. Barclay, G. G.; Hawker, C. J.; Ito, H.; Orellana, A.; Malenfant, P. R. L.; Sinta, R. F. Macromolecules 1998, 31, 1024-1031.

    Article  CAS  Google Scholar 

  33. Thackeray, J. W.; Orsula, G. W.; Denison, M. Proceedings of the SPIE—The International Society for Optical Engineering 1994, 2195,152-163.

    Google Scholar 

  34. Lin, Q.; Simons, J. P.; Angelopoulos, M.; Sooriyakumaran, R. Pro-ceedings of the SPIE—The International Society for Optical Engineer-ing 2002, 4690, 410-418.

    CAS  Google Scholar 

  35. Padmanaban, M.; Kinoshita, Y.; Kudo, T.; Lynch, T.; Masuda, S.; Nozaki, Y.; Okazaki, H.; Pawlowski, G.; Przybilla, K. J.; Roeschert, H.; Spiess, W.; Suehiro, N.; Wengenroth, H. Proceedings of the SPIE—The International Society for Optical Engineering 1994, 2195,61-73.

    Google Scholar 

  36. Barclay, G. G.; King, M.; Orellana, A.; Malenfant, P. R. L.; Sinta, R.; Malmstrom, E.; Ito, H.; Hawker, C. J. In Organic Thin Films 1998; vol. 695, pp. 360-370.

    Article  CAS  Google Scholar 

  37. Ito, H. IBM Journal of Research and Development 2001, 45, 683-695.

    Article  CAS  Google Scholar 

  38. Toukhy, M. A.; Oberlander, J.; Rahman, D.; Houlihan, F. M. Proceed-ings of the SPIE—The International Society for Optical Engineering 2004,5376 (1),384-391.

    CAS  Google Scholar 

  39. Dabbagh, G.; Houlihan, F. M.; Ruskin, I.; Hutton, R. S.; Nalamasu, O.; Reichmanis, E.; Gabor, A. H.; Medina, A. N. Proceedings of the SPIE—The International Society for Optical Engineering 1999, 3678, pt. 1-2, 86-93.

    Google Scholar 

  40. Rushkin, I. L.; Houlihan, F. M.; Kometani, J. M.; Hutton, R. S.; Timko, A. G.; Reichmanis, E.; Nalamasu, O.; Gabor, A. H.; Medina, A. N.; Slater, S. G.; Neisser, M. Proceedings of the SPIE—The International Society for Optical Engineering 1999, 3678, pt. 1-2, 44-50.

    Google Scholar 

  41. Singh, L.; Ludovice, P. J.; Henderson, C. L. Proceedings of the SPIE— The International Society for Optical Engineering 2005, 5753, 319.

    CAS  Google Scholar 

  42. Crivello, J. V. Advances in Polymer Science 1984, 62, 2-48.

    Google Scholar 

  43. Cameron, J. F.; Adams, T.; Orellana, A. J.; Rajaratnam, M. M.; Sinta, R. F. Proceedings of the SPIE—The International Society for Optical Engineering 1997, 3049, 473-484.

    CAS  Google Scholar 

  44. Ueno, T.; Schlegel, L.; Hayashi, N.; Shiraishi, H.; Iwayanagi, T. Polymer Engineering and Science 1992, 32, 1511-1515.

    Article  CAS  Google Scholar 

  45. Cameron, J.; Fradkin, L.; Moore, K.; Pohlers, G. In Proceedings of the SPIE—The International Society for Optical Engineering; Houlihan, F., Ed., 2000; vol. 3999, pt.1-2, pp. 190-203.

    Google Scholar 

  46. Gokan, H.; Esho, S.; Ohnishi, Y. J. Electrochem. Soc. 1983, 130, 143.

    Article  CAS  Google Scholar 

  47. Kunz, R.; Palmateer, S. C.; Forte, A. R.; Allen, R.; Wallraff, G.; DiPietro, P. A.; Hofer, D. Proceedings of the SPIE—The International Society for Optical Engineering 1996, 2724, 365-376.

    Google Scholar 

  48. Wallow, T.; Brock, P.; DiPietro, R.; Allen, R.; Opitz, J.; Sooriyaku-maran, R.; Hofer, D.; Meute, J.; Byers, J.; Rich, G.; McCallum, M.; Schuetze, S.; Jayaraman, S.; Hullihen, K.; Vicari, R.; Rhodes, L.; Goodall, B.; Shick, R. Proceedings of the SPIE—The International Society for Optical Engineering 1998, 3333, pt. 1-2, 92-101.

    Google Scholar 

  49. Dammel, R. R.; Ficner, S.; Oberlander, J.; Klauck-Jacobs, A.; Padmanaban, M.; Khanna, D. N.; Durham, D. L. Proceedings of the SPIE—The International Society for Optical Engineering 1998, 3333, pt. 1-2, 144-151.

    Google Scholar 

  50. Jung, J. C.; Bok, C. K.; Baik, K. H. Proceedings of the SPIE—The International Society for Optical Engineering 1998, vol. 3333, pt. 1-2, 11-25.

    Google Scholar 

  51. Fender, N.; Brock, P. J.; Chau, W.; Bangsaruntip, S.; Mahorowala, A.; Wallraff, G. M.; Hinsberg, W. D.; Larson, C. E.; Ito, H.; Breyta, G.; Burnham, K.; Truong, H.; Lawson, P.; Allen, R. D. Proceedings of the SPIE—The International Society for Optical Engineering 2001, vol. 4345, pt.1-2, 417-427.

    Google Scholar 

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  1. IBM Thomas J. Watson Research Center, 1101 Kitchawan Rd, Route 134, 218, 10598, Yorktown Heights, NY

    Qinghuang Lin

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  1. Qinghuang Lin
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  1. Department of Chemistry, University of Cincinnati, Crosley Tower, Martin Luther King Drive, 45221-0172, Cincinnati, OH

    James E. Mark (Distinguished Research Profess) (Distinguished Research Profess)

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Lin, Q. (2007). Properties of Photoresist Polymers. In: Mark, J.E. (eds) Physical Properties of Polymers Handbook. Springer, New York, NY. https://doi.org/10.1007/978-0-387-69002-5_57

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